Cheng Peng, Zhao Candong, Pan Qinjie, Xiong Zijian, Chen Qi, Miao Xiangshui, He Yuhui
Hubei Yangtze Memory Laboratories, School of Integrated Circuit, Huazhong University of Science and Technology, Wuhan 430074, China.
Sensors (Basel). 2024 Apr 10;24(8):2420. doi: 10.3390/s24082420.
Nanopore sensor technology is widely used in biomolecular detection due to its advantages of low cost and easy operation. In a variety of nanopore manufacturing methods, controlled dielectric breakdown has the advantages of a simple manufacturing process and low cost under the premise of ensuring detection performance. In this paper, we have made enhancements to the applied pulses in controlled dielectric breakdown and utilized the improved dielectric breakdown technique to fabricate silicon nitride nanopores with diameters of 5 to 15 nm. Our improved fabrication method offers the advantage of precise control over the nanopore diameter (±0.4 nm) and enhances the symmetry of the nanopore. After fabrication, we performed electrical characterization on the nanopores, and the IV characteristics exhibited high linearity. Subsequently, we conducted detection experiments for DNA and protein using the prepared nanopores to assess the detection performance of the nanopores fabricated using our method. In addition, we also give a physical model of molecule translocation through the nanopores to give a reasonable explanation of the data processing results.
纳米孔传感器技术因其成本低、操作简便等优点而被广泛应用于生物分子检测。在多种纳米孔制造方法中，受控介电击穿在确保检测性能的前提下，具有制造工艺简单、成本低的优点。在本文中，我们对受控介电击穿中的施加脉冲进行了改进，并利用改进后的介电击穿技术制备了直径为5至15纳米的氮化硅纳米孔。我们改进后的制造方法具有精确控制纳米孔直径（±0.4纳米）的优点，并增强了纳米孔的对称性。制造完成后，我们对纳米孔进行了电学表征，其电流-电压特性呈现出高线性度。随后，我们使用制备好的纳米孔进行了DNA和蛋白质的检测实验，以评估用我们的方法制造的纳米孔的检测性能。此外，我们还给出了分子通过纳米孔的物理模型，以便对数据处理结果作出合理的解释。
