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用于有机电子和可穿戴微系统的具有高灵敏度、宽带宽和低噪声密度的聚合物压电加速度计。

Polymeric piezoelectric accelerometers with high sensitivity, broad bandwidth, and low noise density for organic electronics and wearable microsystems.

作者信息

Ge Chang, Cretu Edmond

机构信息

The Department of Electrical and Computer Engineering, The University of British Columbia, Vancouver, BC Canada.

出版信息

Microsyst Nanoeng. 2024 May 15;10:61. doi: 10.1038/s41378-024-00704-6. eCollection 2024.

Abstract

Piezoelectric accelerometers excel in vibration sensing. In the emerging trend of fully organic electronic microsystems, polymeric piezoelectric accelerometers can be used as vital front-end components to capture dynamic signals, such as vocal vibrations in wearable speaking assistants for those with speaking difficulties. However, high-performance polymeric piezoelectric accelerometers suitable for such applications are rare. Piezoelectric organic compounds such as PVDF have inferior properties to their inorganic counterparts such as PZT. Consequently, most existing polymeric piezoelectric accelerometers have very unbalanced performance metrics. They often sacrifice resonance frequency and bandwidth for a flat-band sensitivity comparable to those of PZT-based accelerometers, leading to increased noise density and limited application potentials. In this study, a new polymeric piezoelectric accelerometer design to overcome the material limitations of PVDF is introduced. This new design aims to simultaneously achieve high sensitivity, broad bandwidth, and low noise. Five samples were manufactured and characterized, demonstrating an average sensitivity of 29.45 pC/g within a ± 10 g input range, a 5% flat band of 160 Hz, and an in-band noise density of 1.4 µg/. These results surpass those of many PZT-based piezoelectric accelerometers, showing the feasibility of achieving comprehensively high performance in polymeric piezoelectric accelerometers to increase their potential in novel applications such as organic microsystems.

摘要

压电加速度计在振动传感方面表现出色。在全有机电子微系统的新兴趋势中,聚合物压电加速度计可作为重要的前端组件来捕获动态信号,例如为有言语困难者设计的可穿戴语音助手所捕捉的语音振动。然而,适用于此类应用的高性能聚合物压电加速度计却很罕见。诸如聚偏二氟乙烯(PVDF)之类的压电有机化合物,与诸如锆钛酸铅(PZT)之类的无机对应物相比,性能较差。因此,大多数现有的聚合物压电加速度计的性能指标非常不均衡。它们常常为了获得与基于PZT的加速度计相当的平坦带灵敏度而牺牲共振频率和带宽,从而导致噪声密度增加以及应用潜力受限。在本研究中,引入了一种新的聚合物压电加速度计设计,以克服PVDF的材料局限性。这种新设计旨在同时实现高灵敏度、宽带宽和低噪声。制造并表征了五个样品,结果表明在±10 g的输入范围内平均灵敏度为29.45 pC/g,160 Hz的平坦带为5%,带内噪声密度为1.4 μg/。这些结果超过了许多基于PZT的压电加速度计,表明在聚合物压电加速度计中实现全面高性能以增加其在诸如有机微系统等新应用中的潜力是可行的。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0a53/11093978/b732d1dbc1ae/41378_2024_704_Fig1_HTML.jpg

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