Algamili Abdullah Saleh, Khir Mohd Haris Md, Dennis John Ojur, Ahmed Abdelaziz Yousif, Alabsi Sami Sultan, Ba Hashwan Saeed Salem, Junaid Mohammed M
Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia.
Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia.
Nanoscale Res Lett. 2021 Jan 26;16(1):16. doi: 10.1186/s11671-021-03481-7.
Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.
在过去几十年里，对微机电系统（MEMS）设备的进步有着很高的需求，以便将经济上小型化的传感器与制造技术集成在一起。传感器是一种检测并响应多种物理输入并将其转换为模拟或数字形式的系统。传感器将这些变化转换为一种可以用作监测设备变量的标记的形式。由于其尺寸小、功耗低、性能优越以及批量制造，MEMS在小型化传感器方面展现出了卓越的可行性。本文介绍了可用于基于MEMS的设备的标准驱动和传感机制的最新进展，预计这将在当前时代彻底改变几乎许多产品类别。还讨论了驱动、传感机制的特色原理以及实际应用。正确理解基于MEMS的设备的驱动和传感机制对于新颖复杂应用设计的有效选择至关重要。
