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具有垂直全栅结构的磷化铟晶体相异质结晶体管。

InP Crystal Phase Heterojunction Transistor with a Vertical Gate-All-Around Structure.

作者信息

Katsumi Yu, Gamo Hironori, Motohisa Junichi, Tomioka Katsuhiro

机构信息

Graduate School of Information Science and Technology, Hokkaido University, North 14 West 9, Sapporo 060-0814, Japan.

Research Center for Integrated Quantum Electronics (RCIQE), Hokkaido University, North 13 West 8, Sapporo 060-0813, Japan.

出版信息

ACS Appl Mater Interfaces. 2024 Jun 12;16(23):30471-30477. doi: 10.1021/acsami.4c00147. Epub 2024 May 31.

Abstract

Crystal phase transitions can form a new type of heterojunction with different atomic arrangements in the same material: crystal phase heterojunction (CPHJ). The CPHJ has an inherently strong impact on band engineering without concerns over critical thicknesses with misfit dislocations and a semiconductor-metal transition. In-plane CPHJ was recently demonstrated in two-dimensional (2D) transition-metal dichalcogenide (TMD) materials and utilized for conventional planar field-effect transistor applications. However, scalability such as gate electrostatic control, miniaturization, and multigate structure have been limited because of the geometrical issue. Here, we demonstrated a transistor using the CPHJ with a vertical gate-all-around structure by forming a CPHJ in conventional III-V semiconductors. The CPHJ, composed of wurtzite InP nanowires with zincblende InP substrates, showed an atomically flat heterojunction without dislocations and indicated a Type-II band discontinuity across the junction. The CPHJ transistor had moderate to good gate electrostatic controllability with high on-state currents and transconductance. The CPHJ offer will provide a new switching mechanism and add a new junction and device design choice to the long history of transistors.

摘要

晶体相变能够在同一材料中形成一种具有不同原子排列的新型异质结

晶体相异质结(CPHJ)。CPHJ对能带工程具有内在的强大影响,无需担心因失配位错和半导体 - 金属转变而产生的临界厚度问题。面内CPHJ最近在二维(2D)过渡金属二硫属化物(TMD)材料中得到了证实,并被用于传统的平面场效应晶体管应用。然而,由于几何问题,诸如栅极静电控制、小型化和多栅极结构等可扩展性受到了限制。在此,我们通过在传统III - V族半导体中形成CPHJ,展示了一种采用垂直全栅结构的CPHJ晶体管。由纤锌矿型InP纳米线与闪锌矿型InP衬底组成的CPHJ,呈现出无位错的原子级平整异质结,并在结处表现出II型能带不连续性。CPHJ晶体管具有适度到良好的栅极静电可控性,具有高导通态电流和跨导。CPHJ的出现将提供一种新的开关机制,并为晶体管的悠久历史增添一种新的结和器件设计选择。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d71/11182027/9ac4c1e49402/am4c00147_0001.jpg

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