Garg Renuka, Gonuguntla Spandana, Sk Saddam, Iqbal Muhammad Saqlain, Dada Adewumi Oluwasogo, Pal Ujjwal, Ahmadipour Mohsen
Department of Chemical and Biological Engineering, American University of Sharjah, Sharjah, PO Box 26666, United Arab Emirates.
Department of Energy & Environmental Engineering, CSIR-Indian Institute of Chemical Technology, Hyderabad 500007, India; Academy of Scientific and Innovative Research (AcSIR), Ghaziabad 201002, India.
Adv Colloid Interface Sci. 2024 Aug;330:103203. doi: 10.1016/j.cis.2024.103203. Epub 2024 May 22.
Sputtering is an effective technique for producing ultrathin films with diverse applications. The review begins by providing an in-depth overview of the background, introducing the early development of sputtering and its principles. Consequently, progress in advancements made in recent decades highlights the renaissance of sputtering as a powerful technology for creating thin films with varied compositions, structures, and properties. For the first time, we have discussed a thorough overview of several sputtered thin film materials based on metal and metal oxide, metal nitride, alloys, carbon, and ceramic-based thin film along with their properties and their applicability in various fields. We further delve into the applications of sputter-coated thin films, specifically emphasizing their relevance in environmental sustainability, energy and electronics, and biomedical fields. We critically examine the recent advancements in developing sputter-coated catalysts for eliminating water pollutants andhydrogen generation. Additionally, the review sheds light on advantages, shortcomings, and future directions for developing sputter-coated thin films utilized in biodegradable metals and alloys with enhanced corrosion resistance and biocompatibility. This review is a comprehensive integration of recent literature, covering diverse sputtering thin film applications. We delve deeply into various material types and emphasize critical analysis of recent advancements, particularly in environmental, energy, and biomedical fields. By offering insights into both advancements and limitations, the review provides a nuanced understanding essential for practical utilization.
溅射是一种用于制备具有多种应用的超薄膜的有效技术。本文首先深入概述了溅射的背景，介绍了其早期发展历程及其原理。随后，近几十年来取得的进展突显了溅射作为一种强大技术的复兴，它能够制造出具有不同成分、结构和性能的薄膜。我们首次全面综述了几种基于金属和金属氧化物、金属氮化物、合金、碳以及陶瓷的溅射薄膜材料，以及它们的性能和在各个领域的适用性。我们进一步深入探讨了溅射镀膜薄膜的应用，特别强调了它们在环境可持续性、能源与电子以及生物医学领域的相关性。我们批判性地审视了用于消除水污染物和制氢的溅射镀膜催化剂的最新进展。此外，本文还阐述了在开发用于可生物降解金属和合金且具有增强耐腐蚀性和生物相容性的溅射镀膜薄膜方面的优势、缺点及未来方向。这篇综述全面整合了近期文献，涵盖了各种溅射薄膜应用。我们深入研究了各种材料类型，并着重对近期进展进行批判性分析，特别是在环境、能源和生物医学领域。通过深入探讨进展和局限性，本文为实际应用提供了必不可少的细致理解。
