Galanti Ashley Morgan, Haidekker Mark A
School of Chemical, Materials and Biomedical Engineering, College of Engineering, University of Georgia, Athens, GA 30602, USA.
Sensors (Basel). 2024 Jun 14;24(12):3841. doi: 10.3390/s24123841.
This study introduces a flexible and low-cost solution for a source measure unit (SMU), which is presented as an alternative to conventional source meter units and a blueprint for sensor FET drivers. An SMU collects current-voltage (I-V) curves with an additional variable voltage or current and is commonly used to characterize semiconductors. We present the hardware design, interfacing, and test results of our SMU. Specifically, we present representative I-V curve measurements for graphene-channel FETs to demonstrate the SMU's capability to efficiently characterize these devices with minimal noise and sufficient accuracy. This cost-effective solution presents a promising avenue for researchers and developers seeking reliable tools for sensor development and characterization. We demonstrate, with the example of surface illumination, how the sensing behavior of graphene-channel FETs can be characterized without the need for expensive equipment. Additionally, the SMU was validated with known passive and active components, along with probe station integration for semiconductor die-scale connection. The SMU's focus on collecting I-V curves, coupled with its ability to identify device defects, such as parasitic Schottky junctions or a failed oxide, contributes to its utility in quality testing for semiconductor devices. Its low-cost nature makes it accessible for various research endeavors, enabling efficient data collection and analysis for graphene-based and other nanomaterial-based sensor applications.
本研究介绍了一种用于源测量单元(SMU)的灵活且低成本的解决方案,该方案可作为传统源表单元的替代方案,并为传感器场效应晶体管(FET)驱动器提供了蓝图。源测量单元通过额外的可变电压或电流来收集电流-电压(I-V)曲线,常用于表征半导体。我们展示了源测量单元的硬件设计、接口和测试结果。具体而言,我们展示了石墨烯沟道场效应晶体管的代表性I-V曲线测量结果,以证明源测量单元能够以最小的噪声和足够的精度高效地表征这些器件。这种具有成本效益的解决方案为寻求可靠工具进行传感器开发和表征的研究人员和开发人员提供了一条充满希望的途径。我们以表面照明为例,展示了如何在无需昂贵设备的情况下表征石墨烯沟道场效应晶体管的传感行为。此外,源测量单元还通过已知的无源和有源元件进行了验证,并与用于半导体芯片级连接的探针台集成。源测量单元专注于收集I-V曲线,再加上其识别器件缺陷(如寄生肖特基结或氧化物失效)的能力,使其在半导体器件的质量测试中发挥了作用。其低成本的特性使其适用于各种研究工作,能够为基于石墨烯和其他纳米材料的传感器应用进行高效的数据收集和分析。