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通过软应变效应突破超宽范围柔性压力传感器的灵敏度饱和

Breaking the Saturation of Sensitivity for Ultrawide Range Flexible Pressure Sensors by Soft-Strain Effect.

作者信息

Li Yue, Zhang Weijie, Zhao Cheng, Li Weiwei, Dong Enchun, Xu Manzhang, Huang He, Yang Yabao, Li Lei, Zheng Lu, Mao Mao, Yao Shuxin, Wang Ling, Ma Jianbing, Wang Xuewen, Huang Wei

机构信息

Frontiers Science Center for Flexible Electronics & Institute of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China.

MIIT Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China.

出版信息

Adv Mater. 2024 Sep;36(36):e2405405. doi: 10.1002/adma.202405405. Epub 2024 Jul 26.

Abstract

The flexible pressure sensors with a broad pressure range and unsaturated sensitivity are highly desired in practical applications. However, pressure sensors by piezoresistive effect are always limited by the compressibility of sensing layers, resulting in a theoretically decreasing sensitivity of less than 100%. Here, a unique strategy is proposed that utilizes the strain effect, simultaneously achieving a trade-off between a wider pressure detection range and unsaturated sensitivity. Ascribed to the strain effect of sensing layers induced by interlaced microdomes, the sensors possess an increased sensitivity (5.22-70 MPa) over an ultrawide pressure range (45 Pa-4.1 MPa), a high-pressure resolution (5 Pa), fast response/recovery time (30/45 ms), and a robust response under a high-pressure loading of 3.5 MPa for more than 5000 cycles. These superior sensing performances allow the sensor to monitor large pressure. The flexible pressure sensor array can assist doctors in restoring the neutral mechanical axis, tracking knee flexion angles, and extracting gait features. Moreover, the flexible sensing array can be integrated into the joint motion surveillance system to map the balance medial-lateral contact forces on the metal compartments in real time, demonstrating the potential for further development into precise medical human-machine interfaces during total knee replacement surgery.

摘要

在实际应用中,人们非常需要具有宽压力范围和不饱和灵敏度的柔性压力传感器。然而,基于压阻效应的压力传感器总是受到传感层可压缩性的限制,导致理论灵敏度下降小于100%。在此,提出了一种独特的策略,即利用应变效应,同时在更宽的压力检测范围和不饱和灵敏度之间实现权衡。由于交错微穹顶引起的传感层应变效应,该传感器在超宽压力范围(45 Pa - 4.1 MPa)内具有更高的灵敏度(5.22 - 70 MPa)、高压力分辨率(5 Pa)、快速响应/恢复时间(30/45 ms),并且在3.5 MPa的高压加载下超过5000次循环仍具有稳健的响应。这些优异的传感性能使该传感器能够监测大压力。柔性压力传感器阵列可以帮助医生恢复中立机械轴、跟踪膝关节屈曲角度并提取步态特征。此外,柔性传感阵列可以集成到关节运动监测系统中,实时映射金属隔室上的内外侧接触力平衡,展示了在全膝关节置换手术中进一步发展为精确医疗人机接口的潜力。

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