Pestov Alexey E, Lopatin Aleksei Ya, Volkov Petr V, Zorina Maria V, Lukyanov Andrei Yu, Malyshev Ilya V, Mikhailenko Mikhail S, Toropov Mikhail N, Semikov Daniil A, Chernyshev Aleksei K, Chkhalo Nikolay I, Yunin Pavel A, Glushkov Egor I, Gordeev Sergey K, Korchagina Svetlana B
Institute for Physics of Microstructures RAS, Nizhny Novgorod 603087, Russian Federation.
CSRI of Materials, St Petersburg 191014, Russian Federation.
J Synchrotron Radiat. 2024 Sep 1;31(Pt 5):1179-1188. doi: 10.1107/S1600577524006088. Epub 2024 Aug 6.
The paper considers the possibility of using the diamond-silicon carbide composite Skeleton with a technological coating of polycrystalline silicon as a substrate for X-ray mirrors used with powerful synchrotron radiation sources (third+ and fourth generation). Samples were studied after polishing to provide the following surface parameters: root-mean-square flatness ≃ 50 nm, micro-roughness on the frame 2 µm × 2 µm σ ≃ 0.15 nm. The heat capacity, thermal conductivity and coefficient of linear thermal expansion were investigated. For comparison, a monocrystalline silicon sample was studied under the same conditions using the same methods. The value of the coefficient of linear thermal expansion turned out to be higher than that of monocrystalline silicon and amounted to 4.3 × 10 K, and the values of thermal conductivity (5.0 W cm K) and heat capacity (1.2 J K g) also exceeded the values for Si. Thermally induced deformations of both Skeleton and monocrystalline silicon samples under irradiation with a CO laser beam have also been experimentally studied. Taking into account the obtained thermophysical constants, the calculation of thermally induced deformation under irradiation with hard (20 keV) X-rays showed almost three times less deformation of the Skeleton sample than of the monocrystalline silicon sample.
本文探讨了使用带有多晶硅技术涂层的金刚石 - 碳化硅复合材料骨架作为与强大同步辐射源（第三代及第四代）配合使用的X射线镜基板的可能性。对抛光后的样品进行了研究，以获得以下表面参数：均方根平面度≃50 nm，框架上2 µm×2 µm区域的微观粗糙度σ≃0.15 nm。研究了热容量、热导率和线性热膨胀系数。为作比较，使用相同方法在相同条件下对单晶硅样品进行了研究。结果表明，线性热膨胀系数的值高于单晶硅，达到4.3×10 K，热导率（5.0 W cm K）和热容量（1.2 J K g）的值也超过了硅的值。还通过实验研究了在CO激光束照射下骨架和单晶硅样品的热致变形。考虑到所获得的热物理常数，对硬（20 keV）X射线照射下的热致变形计算表明，骨架样品的变形比单晶硅样品小近三倍。
