Poonthong Wittawat, Mungkung Narong, Tunlasakun Khanchai, Thungsuk Nuttee, Kasayapanand Nat, Arunrungrusmi Somchai, Tanitteerapan Tanes, Maneepen Threerapong, Songruk Apidat, Yuji Toshifumi
School of Energy Environment and Materials, King Mongkut's University of Technology Thonburi, Bangkok 10140, Thailand.
Faculty of Industrial Education and Technology, King Mongkut's University of Technology Thonburi, Bangkok 10140, Thailand.
Polymers (Basel). 2024 Aug 12;16(16):2283. doi: 10.3390/polym16162283.
This research has developed a process for producing ZnO thin film from DEZn deposited onto a PET substrate with low-pressure, high-frequency Ar + O plasma using a chemical vapor deposition technique. The aim is to study the film production conditions that affect electrical properties, optical properties, and thin film surfaces. This work highlights the use of plasma energy produced from a mixture of gases between Ar + O. Plasma production is stimulated by an RF power supply to deliver high chemical energy and push ZnO atoms from the cathode inside the reactor onto the substrate through surface chemical reactions. The results showed that increasing the RF power in plasma production affected the chemical reactions on the substrate surface of film formations. Film preparation at an RF power of 300 W will result in the thickest films. The film has a continuous columnar formation, and the surface has a granular structure. This results in the lowest electrical resistivity of 1.8 × 10 Ω. In addition, when fabricated into a DSSC device, the device tested the PCE value and showed the highest value at 5.68%. The reason is due to the very rough surface nature of the ZnO film, which increases the scattering and storage of sunlight, making cells more efficient. Therefore, the benefit of this research is that it will be a highly efficient prototype of thin film production technology using a chemical process that reduces production costs and can be used in the industrial development of solar cells.
本研究开发了一种利用化学气相沉积技术,在低压、高频氩气+氧气等离子体作用下,将二乙基锌沉积在聚对苯二甲酸乙二酯(PET)衬底上制备氧化锌(ZnO)薄膜的工艺。目的是研究影响电学性能、光学性能和薄膜表面的成膜条件。这项工作突出了氩气+氧气混合气体产生的等离子体能量的应用。射频电源激发等离子体产生,以提供高化学能,并通过表面化学反应将反应器内阴极上的氧化锌原子推到衬底上。结果表明,增加等离子体产生中的射频功率会影响薄膜形成时衬底表面的化学反应。在300W射频功率下制备的薄膜最厚。该薄膜具有连续的柱状结构,表面具有颗粒状结构。这导致最低电阻率为1.8×10Ω。此外,当制成染料敏化太阳能电池(DSSC)器件时,该器件测试的光电转换效率(PCE)值最高,为5.68%。原因是氧化锌薄膜表面非常粗糙,这增加了太阳光的散射和存储,使电池更高效。因此,本研究的益处在于,它将成为一种高效的薄膜生产技术原型,采用化学工艺降低生产成本,可用于太阳能电池的工业开发。