Tinti Victor Buratto, Han Jin Kyu, Frederiksen Valdemar, Chen Huaiyu, Wallentin Jesper, Kantor Innokenty, Lyksborg-Andersen Anton, Hansen Thomas Willum, Bae Garam, Song Wooseok, Stamate Eugen, de Florio Daniel Zanetti, Bruus Henrik, Esposito Vincenzo
Department of Energy Conversion and Storage, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark.
Center for Engineering, Modeling and Applied Social Sciences, Federal University of ABC, Santo André 09210-580, SP, Brazil.
Sci Adv. 2024 Aug 30;10(35):eadq3444. doi: 10.1126/sciadv.adq3444.
Electromechanical metal oxides, such as piezoceramics, are often incompatible with soft polymers due to their crystallinity requirements, leading to high processing temperatures. This study explores the potential of ceria-based thin films as electromechanical actuators for flexible electronics. Oxygen-deficient fluorites, like cerium oxide, are centrosymmetric nonpiezoelectric crystalline metal oxides that demonstrate giant electrostriction. These films, deposited at low temperatures, integrate seamlessly with various soft substrates like polyimide and PET. Ceria thin films exhibit remarkable electrostriction ( > 10 m V) and inverse pseudo-piezo coefficients ( > 500 pmV), enabling large displacements in soft electromechanical systems. Our study explores resonant and off-resonant configurations in the low-frequency regime (<1 kHz), demonstrating versatility for three-dimensional and transparent electronics. This work advances the understanding of oxygen-defective metal oxide electromechanical properties and paves the way for developing versatile and efficient electromechanical systems for applications in biomedical devices, optical devices, and beyond.
机电金属氧化物，如压电陶瓷，由于其结晶度要求，通常与软聚合物不相容，导致加工温度较高。本研究探索了基于氧化铈的薄膜作为柔性电子机电致动器的潜力。缺氧萤石，如氧化铈，是中心对称的非压电晶体金属氧化物，具有巨大的电致伸缩效应。这些在低温下沉积的薄膜可与聚酰亚胺和PET等各种软基板无缝集成。氧化铈薄膜表现出显著的电致伸缩效应（>10 m V）和逆伪压电系数（>500 pmV），能够在软机电系统中实现大位移。我们的研究探索了低频范围（<1 kHz）内的共振和非共振配置，展示了其在三维和透明电子学方面的通用性。这项工作增进了对缺氧金属氧化物机电性能的理解，并为开发用于生物医学设备、光学设备等应用的通用高效机电系统铺平了道路。
