CONCAVE Research Centre, Department of Mechanical and Industrial Engineering, Concordia University, Montreal, Quebec H3G 1M8, Canada.
Sensors (Basel). 2010;10(2):1338-54. doi: 10.3390/s100201338. Epub 2010 Feb 11.
Pressure measurement in high temperature environments is important in many applications to provide valuable information for performance studies. Information on pressure patterns is highly desirable for improving performance, condition monitoring and accurate prediction of the remaining life of systems that operate in extremely high temperature environments, such as gas turbine engines. A number of technologies have been recently investigated, however these technologies target specific applications and they are limited by the maximum operating temperature. Thick and thin films of SiCN can withstand high temperatures. SiCN is a polymer-derived ceramic with liquid phase polymer as its starting material. This provides the advantage that it can be molded to any shape. CERASET™ also yields itself for photolithography, with the addition of photo initiator 2, 2-Dimethoxy-2-phenyl-acetophenone (DMPA), thereby enabling photolithographical patterning of the pre-ceramic polymer using UV lithography. SiCN fabrication includes thermosetting, crosslinking and pyrolysis. The technology is still under investigation for stability and improved performance. This work presents the preparation of SiCN films to be used as the body of a sensor for pressure measurements in high temperature environments. The sensor employs the phenomenon of drag effect. The pressure sensor consists of a slender sensitive element and a thick blocking element. The dimensions and thickness of the films depend on the intended application of the sensors. Fabrication methods of SiCN ceramics both as thin (about 40-60 μm) and thick (about 2-3 mm) films for high temperature applications are discussed. In addition, the influence of thermosetting and annealing processes on mechanical properties is investigated.
在许多应用中，高温环境下的压力测量非常重要，因为它可以提供有关性能研究的有价值信息。了解压力模式对于提高性能、状态监测和准确预测在极高温度环境中运行的系统的剩余寿命非常重要，例如燃气涡轮发动机。最近已经研究了许多技术，但是这些技术针对特定的应用，并且受到最大工作温度的限制。SiCN 的厚膜和薄膜都可以承受高温。SiCN 是一种聚合物衍生的陶瓷，其起始材料为液相聚合物。这提供了一个优势，即它可以模制成任何形状。CERASET™ 还可以与光引发剂 2,2-二甲氧基-2-苯基-苯乙酮（DMPA）一起进行光刻，从而可以使用 UV 光刻对预陶瓷聚合物进行光刻图案化。SiCN 的制造包括热固性、交联和热解。该技术仍在研究稳定性和提高性能。这项工作提出了制备 SiCN 薄膜的方法，将其用作高温环境下压力测量传感器的主体。该传感器利用阻力效应现象。压力传感器由细长的敏感元件和厚的阻挡元件组成。薄膜的尺寸和厚度取决于传感器的预期应用。讨论了用于高温应用的 SiCN 陶瓷的薄膜（约 40-60μm）和厚膜（约 2-3mm）的制造方法。此外，还研究了热固性和退火过程对机械性能的影响。
