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通过光刻辅助化学机械蚀刻（PLACE）在硅上制备的高提取率TaO芯/SiO包层光子波导。

High-Extraction-Rate TaO-Core/SiO-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE).

作者信息

Liu Jian, Liang Youting, Gao Lang, Sun Chao, Guan Jianglin, Wang Zhe, Liu Zhaoxiang, Fang Zhiwei, Wang Min, Zhang Haisu, Cheng Ya

机构信息

State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.

The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China.

出版信息

Nanomaterials (Basel). 2024 Sep 9;14(17):1466. doi: 10.3390/nano14171466.

DOI:10.3390/nano14171466
PMID:39269128
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11397605/
Abstract

We demonstrate high-extraction-rate TaO-core/SiO-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70% coupling efficiency with optical fibers and medium propagation loss around 1 dB/cm are investigated in the experiment. Monolithic microring resonators based on TaO waveguides have shown the quality factors to be above 10 near 1550 nm. The demonstrated TaO waveguides and their fabrication method hold great promise in various cost-effective applications, such as optical interconnecting and switching.

摘要

我们展示了通过光刻辅助化学机械蚀刻技术在硅上制备的高提取率TaO芯/SiO包层光子波导。实验研究了与光纤耦合效率大于70%且传播损耗约为1 dB/cm的低限制波导。基于TaO波导的单片微环谐振器在1550 nm附近的品质因数已超过10。所展示的TaO波导及其制造方法在诸如光互连和开关等各种具有成本效益的应用中具有很大的前景。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1aa2/11397605/27b97be1c709/nanomaterials-14-01466-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1aa2/11397605/3776a52aa682/nanomaterials-14-01466-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1aa2/11397605/141bc80fc9d1/nanomaterials-14-01466-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1aa2/11397605/8636c0c5a2eb/nanomaterials-14-01466-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1aa2/11397605/fadc43e42ac3/nanomaterials-14-01466-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1aa2/11397605/f2565945289c/nanomaterials-14-01466-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1aa2/11397605/27b97be1c709/nanomaterials-14-01466-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1aa2/11397605/3776a52aa682/nanomaterials-14-01466-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1aa2/11397605/141bc80fc9d1/nanomaterials-14-01466-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1aa2/11397605/8636c0c5a2eb/nanomaterials-14-01466-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1aa2/11397605/fadc43e42ac3/nanomaterials-14-01466-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1aa2/11397605/f2565945289c/nanomaterials-14-01466-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1aa2/11397605/27b97be1c709/nanomaterials-14-01466-g006.jpg

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本文引用的文献

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High-quality factor TaO-on-insulator resonators with ultimate thermal stability.具有极高热稳定性的高品质因数氧化钽绝缘体上谐振器。
Opt Lett. 2023 Nov 1;48(21):5783-5786. doi: 10.1364/OL.499726.
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Probing material absorption and optical nonlinearity of integrated photonic materials.探究集成光子材料的材料吸收和光学非线性
Nat Commun. 2022 Jun 9;13(1):3323. doi: 10.1038/s41467-022-30966-5.
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Ultra-low loss visible light waveguides for integrated atomic, molecular, and quantum photonics.用于集成原子、分子和量子光子学的超低损耗可见光波导。
Opt Express. 2022 Feb 28;30(5):6960-6969. doi: 10.1364/OE.448938.
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High-performance lasers for fully integrated silicon nitride photonics.用于全集成氮化硅光子学的高性能激光器。
Nat Commun. 2021 Nov 17;12(1):6650. doi: 10.1038/s41467-021-26804-9.
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Higher order mode supercontinuum generation in tantalum pentoxide (TaO) channel waveguide.五氧化二钽（Ta₂O₅）通道波导中的高阶模超连续谱产生
Sci Rep. 2021 Apr 12;11(1):7978. doi: 10.1038/s41598-021-86922-8.
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Supercontinuum generation in tantalum pentoxide waveguides for pump wavelengths in the 900 nm to 1500 nm spectral region.在900纳米至1500纳米光谱区域内，用于泵浦波长的五氧化二钽波导中的超连续谱产生。
Opt Express. 2020 Oct 12;28(21):32173-32184. doi: 10.1364/OE.403089.
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Visible to near-infrared octave spanning supercontinuum generation in tantalum pentoxide (TaO) air-cladding waveguide.近红外倍频超连续谱在五氧化二钽（TaO）空气包层波导中的产生。
Opt Lett. 2019 Mar 15;44(6):1512-1515. doi: 10.1364/OL.44.001512.
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Low-loss and high-Q Ta(2)O(5) based micro-ring resonator with inverse taper structure.具有反向锥形结构的基于Ta(2)O(5)的低损耗高Q值微环谐振器。
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