Rabiei Payam, Rao Ashutosh, Chiles Jeff, Ma Jichi, Fathpour Sasan
Opt Lett. 2014 Sep 15;39(18):5379-82. doi: 10.1364/OL.39.005379.
A platform for high index-contrast integrated photonics based on tantalum pentoxide submicrometer waveguides on silicon substrates is introduced. The platform allows demonstration of microring resonators with loaded quality factor, Q, of 67,000 and waveguides with a propagation loss of 4.9 dB/cm. Grating couplers, with an insertion loss of ~6 dB per coupler and 3 dB bandwidth of ~50 nm, are also demonstrated and integrated with microring resonators.
介绍了一种基于硅衬底上五氧化二钽亚微米波导的高折射率对比度集成光子学平台。该平台能够展示加载品质因数Q为67000的微环谐振器以及传播损耗为4.9 dB/cm的波导。还展示了插入损耗约为每个耦合器6 dB且3 dB带宽约为50 nm的光栅耦合器,并将其与微环谐振器集成在一起。