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镍在氢蚀刻WS表面的生长行为。

Growth Behavior of Ni on Hydrogen-Etched WS Surface.

作者信息

Liu Hui-Ting, Chen Wan-Hsin, Chang Shu-Jui, Yang Chueh-Cheng, Wang Chia-Hsin, Liu Wei-Tung, Chen Kuan-Yu, Kawakami Naoya, Lin Kuan-Bo, Lin Chun-Liang, Hu Chenming

机构信息

International College of Semiconductor Technology, Hsinchu 300093, Taiwan.

Department of Electrophysics, National Yang Ming Chiao Tung University, Hsinchu 300093, Taiwan.

出版信息

ACS Appl Mater Interfaces. 2024 Oct 7;16(41):56336-42. doi: 10.1021/acsami.4c11506.

Abstract

Transition metal dichalcogenides (TMDs) are 2D materials in which the layers are stacked together by van der Waals forces. Although TMDs are expected to be promising for electronic applications, forming a uniform electrode on them is challenging because of the low adhesion forces between metals and TMDs. This study focuses on improving the quality of metal electrodes by introducing atomic H to create surface defects, using Ni on WS as an example. The detailed effects of H etching and subsequent Ni growth were investigated using scanning tunneling microscopy (STM) and synchrotron-based X-ray photoemission (XPS) techniques. Our studies reveal that introducing point defects of ∼3.05 × 10 cm on the WS surface, results in a significant shift in Ni growth from the Volmer-Weber to a near Frank-van der Merwe mode. The origin of the change is the bond formation between the Ni and W atoms, which is expected to realize ohmic contact. The optimization of metal-TMD interfaces offers valuable insights for advanced applications.

摘要

过渡金属二硫属化物(TMDs)是二维材料,其各层通过范德华力堆叠在一起。尽管TMDs有望在电子应用中发挥作用,但由于金属与TMDs之间的附着力较低,在其上形成均匀的电极具有挑战性。本研究以WS上的Ni为例,通过引入原子H以产生表面缺陷,着重于提高金属电极的质量。使用扫描隧道显微镜(STM)和基于同步加速器的X射线光电子能谱(XPS)技术研究了H蚀刻及随后的Ni生长的详细影响。我们的研究表明,在WS表面引入约3.05×10 cm的点缺陷,会导致Ni的生长模式从伏尔默-韦伯模式显著转变为接近弗兰克-范德梅韦模式。这种变化的根源是Ni与W原子之间形成的键,有望实现欧姆接触。金属-TMD界面的优化为先进应用提供了有价值的见解。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bbee/11492163/810fbb718381/am4c11506_0001.jpg

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