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全硅等离子体热电子探测器的近红外偏振敏感检测

Near-Infrared Polarization-Sensitive Detection by All-Si Plasmonic Hot Electron Detectors.

作者信息

Tian Shuoqiu, Yuan Wentao, Yu Yu, Guo Jinyu, Liu Kangping, Tong Xujie, Chen Qiucheng, Wu Qingxin, Quan Hao, Zhou Jing, Chen Yifang

机构信息

Nanolithography and Application Research Group, School of Information Science and Technology, Fudan University, Shanghai 200433, China.

Shanghai Key Laboratory of Metasurfaces for Light Manipulation, Shanghai 200433, China.

出版信息

Nano Lett. 2024 Oct 23;24(42):13388-13396. doi: 10.1021/acs.nanolett.4c03959. Epub 2024 Oct 9.

Abstract

Polarization-sensitive optoelectronic detection has been achieved by an all-Si detector in the NIR range, based on plasmon hot electron generation/internal photoemission effect. An advanced architecture with a specially designed anisotropic metasurface was developed and structurally optimized for maximizing the internal quantum efficiency (IQE). Assisted by finite difference time domain (FDTD) simulations, the well-designed device exhibits a maximum optical absorption of 80% around 1.45 μm, corresponding to an optical discrimination ratio of 120. Optoelectronic measurements show the peak responsivity and detectivity of 51.2 mA/W and 8.05 × 10 cm Hz/W, respectively, at 1.45 μm. A high polarization photocurrent ratio of 35 nm is also achieved at 1.55 μm. Moreover, the optoelectronic response can be tuned by a back-gate bias. Last but not least, we built up a model for theoretically estimating the IQE, which provides instructive guidance for further enhancing the optoelectronic performance of hot electron detectors.

摘要

基于等离子体热电子产生/内光电发射效应,全硅探测器已在近红外范围内实现了偏振敏感光电探测。开发了一种具有特殊设计的各向异性超表面的先进结构,并对其进行了结构优化,以最大化内部量子效率(IQE)。在时域有限差分(FDTD)模拟的辅助下,精心设计的器件在1.45μm左右表现出80%的最大光吸收,对应的光学鉴别率为120。光电测量表明,在1.45μm处,峰值响应度和探测率分别为51.2 mA/W和8.05×10 cm Hz/W。在1.55μm处也实现了35 nm的高偏振光电流比。此外,光电响应可通过背栅偏压进行调节。最后但同样重要的是,我们建立了一个用于理论估计IQE的模型,这为进一步提高热电子探测器的光电性能提供了指导性的建议。

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