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用于运动识别的二维钙钛矿氧化物的晶圆级集成。

Wafer-scale integration of two-dimensional perovskite oxides towards motion recognition.

作者信息

Deng Ming, Li Ziqing, Liu Shiyuan, Fang Xiaosheng, Wu Limin

机构信息

Department of Materials Science and State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai, P. R. China.

Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, State Key Laboratory of Photovoltaic Science and Technology, Fudan University, Shanghai, P. R. China.

出版信息

Nat Commun. 2024 Oct 10;15(1):8789. doi: 10.1038/s41467-024-52840-2.

Abstract

Two-dimensional semiconductors have shown great potential for the development of advanced intelligent optoelectronic systems. Among them, two-dimensional perovskite oxides with compelling optoelectronic performance have been thriving in high-performance photodetection. However, harsh synthesis and defect chemistry severely limit their overall performance and further large-scale heterogeneous integration. Here, we report the wafer-scale integration of highly oriented nanosheets by introducing a charge-assisted oriented assembly film-formation process and confirm its universality and scalability. The shallow-trap dominance induced by structural optimization endows the device with a distinguished performance balance, including high photosensitivity close to that of single nanosheet units and fast response speed. An integrated ultra-flexible 256-pixel device demonstrates the versatility of material-to-substrate integration and conformal imaging functionality. Moreover, the device achieves efficient recognition of multidirectional motion trajectories with an accuracy of over 99.8%. Our work provides prescient insights into the large-area fabrication and utilization of 2D perovskite oxides in advanced optoelectronics.

摘要

二维半导体在先进智能光电子系统的发展中展现出了巨大潜力。其中,具有出色光电性能的二维钙钛矿氧化物在高性能光探测领域蓬勃发展。然而,苛刻的合成条件和缺陷化学严重限制了它们的整体性能以及进一步的大规模异质集成。在此,我们通过引入电荷辅助取向组装成膜工艺报道了高度取向纳米片的晶圆级集成,并证实了其通用性和可扩展性。结构优化所诱导的浅陷阱主导特性赋予了该器件卓越的性能平衡,包括接近单个纳米片单元的高光敏性和快速响应速度。一个集成的超柔性256像素器件展示了材料与衬底集成的多功能性以及共形成像功能。此外,该器件能够以超过99.8%的准确率高效识别多向运动轨迹。我们的工作为二维钙钛矿氧化物在先进光电子学中的大面积制造和应用提供了前瞻性见解。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a1c0/11467426/1d34457b5427/41467_2024_52840_Fig1_HTML.jpg

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