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基于兰姆波谐振器的物理传感器。

Physical Sensors Based on Lamb Wave Resonators.

作者信息

Yu Zixia, Yue Yongqing, Liang Zhaozhao, Zhao Xiaolong, Li Fangpei, Peng Wenbo, Zhu Quanzhe, He Yongning

机构信息

The Key Lab of Micro-Nano Electronics and System Integration of Xi'an City, School of Microelectronics, Faculty of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Shaanxi Advanced Semiconductor Technology Center Co., Ltd., Xi'an 710077, China.

出版信息

Micromachines (Basel). 2024 Oct 9;15(10):1243. doi: 10.3390/mi15101243.

DOI:10.3390/mi15101243
PMID:39459117
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11509218/
Abstract

A Lamb wave is a guided wave that propagates within plate-like structures, with its vibration mode resulting from the coupling of a longitudinal wave and a shear vertical wave, which can be applied in sensors, filters, and frequency control devices. The working principle of Lamb wave sensors relies on the excitation and propagation of this guided wave within piezoelectric material. Lamb wave sensors exhibit significant advantages in various sensing applications due to their unique wave characteristics and design flexibility. Compared to traditional surface acoustic wave (SAW) and bulk acoustic wave (BAW) sensors, Lamb wave sensors can not only achieve higher frequencies and quality factors in smaller dimensions but also exhibit superior integration and multifunctionality. In this paper, we briefly introduce Lamb wave sensors, summarizing methods for enhancing their sensitivity through optimizing electrode configurations and adjusting piezoelectric thin plate structures. Furthermore, this paper systematically explores the development of Lamb wave sensors in various sensing applications and provides new insights into their future development.

摘要

兰姆波是一种在板状结构中传播的导波，其振动模式由纵波和垂直剪切波耦合产生，可应用于传感器、滤波器和频率控制装置。兰姆波传感器的工作原理依赖于这种导波在压电材料中的激发和传播。由于其独特的波特性和设计灵活性，兰姆波传感器在各种传感应用中表现出显著优势。与传统的表面声波（SAW）和体声波（BAW）传感器相比，兰姆波传感器不仅可以在更小尺寸下实现更高的频率和品质因数，还具有卓越的集成性和多功能性。在本文中，我们简要介绍兰姆波传感器，总结通过优化电极配置和调整压电薄板结构来提高其灵敏度的方法。此外，本文系统地探讨了兰姆波传感器在各种传感应用中的发展，并为其未来发展提供了新的见解。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/c21483e0a0a9/micromachines-15-01243-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/b16cc2e5bdc4/micromachines-15-01243-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/d0230dea3497/micromachines-15-01243-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/75122fcc3ca1/micromachines-15-01243-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/f33007fe8c85/micromachines-15-01243-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/b441eefec60f/micromachines-15-01243-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/500081cfe232/micromachines-15-01243-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/93ffb700bc8a/micromachines-15-01243-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/44c211d3576e/micromachines-15-01243-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/d311dbb9d085/micromachines-15-01243-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/37ddcb4280a4/micromachines-15-01243-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/5606c05d881e/micromachines-15-01243-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/b3bd8145c057/micromachines-15-01243-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/1e5d0092555e/micromachines-15-01243-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/c21483e0a0a9/micromachines-15-01243-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/b16cc2e5bdc4/micromachines-15-01243-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/d0230dea3497/micromachines-15-01243-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/75122fcc3ca1/micromachines-15-01243-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/f33007fe8c85/micromachines-15-01243-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/b441eefec60f/micromachines-15-01243-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/500081cfe232/micromachines-15-01243-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/93ffb700bc8a/micromachines-15-01243-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/44c211d3576e/micromachines-15-01243-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/d311dbb9d085/micromachines-15-01243-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/37ddcb4280a4/micromachines-15-01243-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/5606c05d881e/micromachines-15-01243-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/b3bd8145c057/micromachines-15-01243-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/1e5d0092555e/micromachines-15-01243-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5538/11509218/c21483e0a0a9/micromachines-15-01243-g014.jpg

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