• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利:CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法,用中文像聊天一样搜索,搜遍4000万医学文献。AI智能推荐,让科研检索更轻松。

立即免费搜索

文件翻译

保留排版,准确专业,支持PDF/Word/PPT等文件格式,支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述,25分钟生成高质量综述,智能提取关键信息,辅助科研写作。

立即免费体验

用于二维场效应晶体管的单晶三氧化二锑电介质

A Single-Crystal Antimony Trioxide Dielectric for 2D Field-Effect Transistors.

作者信息

Wang Dainan, Dong Weikang, Wang Ping, Hu Qingmei, Li Dian, Lv Lu, Yang Yang, Jia Lin, Na Rui, Zheng Shoujun, Miao Jinshui, Sun Hui, Xiong Yan, Zhou Jiadong

机构信息

Centre for Quantum Physics, Key Laboratory of Advanced Optoelectronic Quantum Architecture and Measurement (MOE), School of Physics, Beijing Institute of Technology, Beijing, 100081, China.

Advanced Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, Beijing, 100081, China.

出版信息

Small. 2025 Jan;21(1):e2402689. doi: 10.1002/smll.202402689. Epub 2024 Nov 6.

DOI:10.1002/smll.202402689
PMID:39502011
Abstract

The remarkable potential of two-dimensional (2D) materials in sustaining Moore's law has sparked a research frenzy. Extensive efforts have been made in the research of utilizing 2D semiconductors as channel materials in field-effect transistors. However, the next generation of integrated devices requires the integration of gate dielectrics with wider bandgaps and higher dielectric constants. Here, insulating α-SbO single-crystal nanosheets are synthesized by one-step chemical vapor deposition method. Importantly, the α-SbO single-crystal dielectric exhibits a high dielectric constant of 11.8 and a wide bandgap of 3.78 eV. Besides, the atomically smooth interface between α-SbO and MoS enables the fabrication of dual-gated field-effect transistors with the top gate dielectric of α-SbO nanosheets. The field-effect transistors exhibit a switching ratio of exceeding 10, which achieves the manipulation of field-effect transistors by using 2D dielectric materials. These results hold significant implications for optimizing the performances of 2D devices and innovating microelectronics.

摘要

二维(2D)材料在延续摩尔定律方面的巨大潜力引发了一场研究热潮。在利用二维半导体作为场效应晶体管的沟道材料的研究方面已经付出了巨大努力。然而,下一代集成器件需要集成具有更宽带隙和更高介电常数的栅极电介质。在此,通过一步化学气相沉积法合成了绝缘的α-SbO单晶纳米片。重要的是,α-SbO单晶电介质表现出11.8的高介电常数和3.78 eV的宽带隙。此外,α-SbO与MoS之间原子级光滑的界面使得能够制造以α-SbO纳米片作为顶栅电介质的双栅场效应晶体管。这些场效应晶体管表现出超过10的开关比,实现了使用二维介电材料对场效应晶体管的操控。这些结果对于优化二维器件的性能和创新微电子学具有重要意义。

相似文献

1
A Single-Crystal Antimony Trioxide Dielectric for 2D Field-Effect Transistors.用于二维场效应晶体管的单晶三氧化二锑电介质
Small. 2025 Jan;21(1):e2402689. doi: 10.1002/smll.202402689. Epub 2024 Nov 6.
2
High- 2D SbO Made Using a Substrate-Independent and Low-Temperature Liquid-Metal-Based Process.采用与衬底无关的低温液态金属基工艺制备的高2D SbO
ACS Nano. 2021 Oct 26;15(10):16067-16075. doi: 10.1021/acsnano.1c04631. Epub 2021 Oct 8.
3
MoS Transistors with 4 nm hBN Gate Dielectric and 0.46 V Threshold Voltage.具有4纳米六方氮化硼栅极电介质和0.46伏阈值电压的金属氧化物半导体场效应晶体管
ACS Nano. 2025 May 6;19(17):16903-16912. doi: 10.1021/acsnano.5c02341. Epub 2025 Apr 24.
4
Van der Waals Epitaxially Grown Molecular Crystal Dielectric SbO for 2D Electronics.用于二维电子学的范德华外延生长分子晶体电介质SbO
ACS Nano. 2024 May 21;18(20):13098-13105. doi: 10.1021/acsnano.4c01883. Epub 2024 May 4.
5
Single-crystalline High-κ GdOCl dielectric for two-dimensional field-effect transistors.用于二维场效应晶体管的单晶高κ氧化钆氯电介质
Nat Commun. 2024 Nov 2;15(1):9469. doi: 10.1038/s41467-024-53907-w.
6
Scalable integration of hybrid high-κ dielectric materials on two-dimensional semiconductors.混合高κ介电材料在二维半导体上的可扩展集成。
Nat Mater. 2023 Sep;22(9):1078-1084. doi: 10.1038/s41563-023-01626-w. Epub 2023 Aug 3.
7
2D Amorphous GaO Gate Dielectric for β-GaO Field-Effect Transistors.用于β-GaO场效应晶体管的二维非晶GaO栅极电介质
ACS Appl Mater Interfaces. 2023 Aug 9;15(31):37687-37695. doi: 10.1021/acsami.3c07126. Epub 2023 Jul 27.
8
Single-crystalline metal-oxide dielectrics for top-gate 2D transistors.用于顶栅 2D 晶体管的单晶金属氧化物电介质。
Nature. 2024 Aug;632(8026):788-794. doi: 10.1038/s41586-024-07786-2. Epub 2024 Aug 7.
9
High-κ perovskite membranes as insulators for two-dimensional transistors.高κ钙钛矿膜作为二维晶体管的绝缘体。
Nature. 2022 May;605(7909):262-267. doi: 10.1038/s41586-022-04588-2. Epub 2022 May 11.
10
Vertically grown ultrathin BiSiO as high-κ single-crystalline gate dielectric.垂直生长的超薄硅酸铋作为高κ单晶栅介质。
Nat Commun. 2023 Jul 21;14(1):4406. doi: 10.1038/s41467-023-40123-1.

引用本文的文献

1
Elastic Constants of Few-Layer α‑SbO from First-Principles Calculations: Insights into Mechanical Properties.基于第一性原理计算的少层α-SbO的弹性常数:对力学性能的洞察
ACS Omega. 2025 Jul 11;10(28):30918-30923. doi: 10.1021/acsomega.5c03389. eCollection 2025 Jul 22.