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用于二维场效应晶体管的单晶三氧化二锑电介质

A Single-Crystal Antimony Trioxide Dielectric for 2D Field-Effect Transistors.

作者信息

Wang Dainan, Dong Weikang, Wang Ping, Hu Qingmei, Li Dian, Lv Lu, Yang Yang, Jia Lin, Na Rui, Zheng Shoujun, Miao Jinshui, Sun Hui, Xiong Yan, Zhou Jiadong

机构信息

Centre for Quantum Physics, Key Laboratory of Advanced Optoelectronic Quantum Architecture and Measurement (MOE), School of Physics, Beijing Institute of Technology, Beijing, 100081, China.

Advanced Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, Beijing, 100081, China.

出版信息

Small. 2025 Jan;21(1):e2402689. doi: 10.1002/smll.202402689. Epub 2024 Nov 6.

Abstract

The remarkable potential of two-dimensional (2D) materials in sustaining Moore's law has sparked a research frenzy. Extensive efforts have been made in the research of utilizing 2D semiconductors as channel materials in field-effect transistors. However, the next generation of integrated devices requires the integration of gate dielectrics with wider bandgaps and higher dielectric constants. Here, insulating α-SbO single-crystal nanosheets are synthesized by one-step chemical vapor deposition method. Importantly, the α-SbO single-crystal dielectric exhibits a high dielectric constant of 11.8 and a wide bandgap of 3.78 eV. Besides, the atomically smooth interface between α-SbO and MoS enables the fabrication of dual-gated field-effect transistors with the top gate dielectric of α-SbO nanosheets. The field-effect transistors exhibit a switching ratio of exceeding 10, which achieves the manipulation of field-effect transistors by using 2D dielectric materials. These results hold significant implications for optimizing the performances of 2D devices and innovating microelectronics.

摘要

二维(2D)材料在延续摩尔定律方面的巨大潜力引发了一场研究热潮。在利用二维半导体作为场效应晶体管的沟道材料的研究方面已经付出了巨大努力。然而,下一代集成器件需要集成具有更宽带隙和更高介电常数的栅极电介质。在此,通过一步化学气相沉积法合成了绝缘的α-SbO单晶纳米片。重要的是,α-SbO单晶电介质表现出11.8的高介电常数和3.78 eV的宽带隙。此外,α-SbO与MoS之间原子级光滑的界面使得能够制造以α-SbO纳米片作为顶栅电介质的双栅场效应晶体管。这些场效应晶体管表现出超过10的开关比,实现了使用二维介电材料对场效应晶体管的操控。这些结果对于优化二维器件的性能和创新微电子学具有重要意义。

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