Dose-efficient phase-contrast imaging of thick weak phase objects via OBF STEM using a pixelated detector.

Optimum bright-field scanning transmission electron microscopy (OBF STEM) is a recently developed low-dose imaging technique that uses a segmented or pixelated detector. While we previously reported that OBF STEM with a segmented detector has a higher efficiency than conventional STEM techniques such as annular bright field (ABF), the imaging efficiency is expected to be further improved by using a pixelated detector. In this study, we adopted a pixelated detector for the OBF technique and investigated the imaging characteristics. Because OBF imaging is based on the thick weak phase object approximation (tWPOA), a non-zero crystalline sample thickness is considered in addition to the conventional WPOA, where the pixelated OBF method can be regarded as the theoretical extension of single side band (SSB) ptychography. Thus, we compared these two techniques via signal-to-noise ratio transfer functions (SNRTFs), multi-slice image simulations, and experiments, showing how the OBF technique can improve dose efficiency from the conventional WPOA-based ptychographic imaging.