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关于谐振微机电系统电场传感器的综述

A Review on Resonant MEMS Electric Field Sensors.

作者信息

Wang Guijie, Yang Pengfei, Chu Zhaozhi, Ran Lifang, Li Jianhua, Zhang Bo, Wen Xiaolong

机构信息

School of Mathematics and Physics, Beijing Weak Magnetic Testing and Applied Engineering Technology Research Center, University of Science and Technology Beijing, Beijing 100083, China.

School of Applied Science, Beijing Information Science and Technology University, Beijing 100192, China.

出版信息

Micromachines (Basel). 2024 Oct 31;15(11):1333. doi: 10.3390/mi15111333.

DOI:10.3390/mi15111333
PMID:39597145
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11596163/
Abstract

Electric field sensors (EFSs) are widely used in various fields, particularly in accurately assessing atmospheric electric fields and high-voltage power lines. Precisely detecting electric fields enhances the accuracy of weather forecasting and contributes to the safe operation of power grids. This paper comprehensively reviews the development of micro-electromechanical system (MEMS) resonant EFSs, including theoretical analysis, working principles, and applications. MEMS resonant EFSs have developed into various structures over the past decades. They have been reported to measure electric field strength by detecting changes in the induced charge on the electrodes. Significant advancements include diverse driving and sensing structures, along with improved dynamic range, sensitivity, and resolution. Recently, mode localization has gained attention and has been applied to electric field sensing. This paper reviews the performances and structures of MEMS resonant EFSs over recent decades and highlights recent advances in weakly coupled resonant EFSs, offering comprehensive guidance for researchers.

摘要

电场传感器（EFSs）广泛应用于各个领域，尤其是在精确评估大气电场和高压电力线方面。精确检测电场可提高天气预报的准确性，并有助于电网的安全运行。本文全面综述了微机电系统（MEMS）谐振式电场传感器的发展，包括理论分析、工作原理和应用。在过去几十年中，MEMS谐振式电场传感器已发展出多种结构。据报道，它们通过检测电极上感应电荷的变化来测量电场强度。重大进展包括多样的驱动和传感结构，以及动态范围、灵敏度和分辨率的提高。最近，模式局域化受到关注并已应用于电场传感。本文综述了近几十年来MEMS谐振式电场传感器的性能和结构，并突出了弱耦合谐振式电场传感器的最新进展，为研究人员提供全面指导。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9259/11596163/68996a73e96f/micromachines-15-01333-g023.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9259/11596163/68bf234cfcf1/micromachines-15-01333-g011.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9259/11596163/a17e06e05768/micromachines-15-01333-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9259/11596163/20f4ce21de68/micromachines-15-01333-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9259/11596163/c4e3d1bcaeba/micromachines-15-01333-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9259/11596163/fd67d747a135/micromachines-15-01333-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9259/11596163/350abb69d46f/micromachines-15-01333-g020.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9259/11596163/2af1276dcc0b/micromachines-15-01333-g021.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9259/11596163/68996a73e96f/micromachines-15-01333-g023.jpg

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