• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

基于MEMS的低交叉轴耦合干扰三维电场传感器的设计、制造与表征

Design, Fabrication and Characterization of a MEMS-Based Three-Dimensional Electric Field Sensor with Low Cross-Axis Coupling Interference.

作者信息

Ling Biyun, Peng Chunrong, Ren Ren, Chu Zhaozhi, Zhang Zhouwei, Lei Hucheng, Xia Shanhong

机构信息

State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China.

University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Sensors (Basel). 2018 Mar 15;18(3):870. doi: 10.3390/s18030870.

DOI:10.3390/s18030870
PMID:29543744
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5877351/
Abstract

One of the major concerns in the development of three-dimensional (3D) electric field sensors (EFSs) is their susceptibility to cross-axis coupling interference. The output signal for each sensing axis of a 3D EFS is often coupled by electric field components from the two other orthogonal sensing axes. In this paper, a one-dimensional (1D) electric field sensor chip (EFSC) with low cross-axis coupling interference is presented. It is designed to be symmetrical, forming a pair of in-plane symmetrically-located sensing structures. Using a difference circuit, the 1D EFSC is capable of sensing parallel electric fields along symmetrical structures and eliminating cross-axis coupling interference, which is contrast to previously reported 1D EFSCs designed for perpendicular electric field component measurement. Thus, a 3D EFS with low cross-axis coupling interference can be realized using three proposed 1D EFSCs. This 3D EFS has the advantages of low cross-axis coupling interference, small size, and high integration. The testing and calibration systems of the proposed 3D EFS were developed. Experimental results show that in the range of 0-120 kV/m, cross-axis sensitivities are within 5.48%, and the total measurement errors of this 3D EFS are within 6.16%.

摘要

三维（3D）电场传感器（EFS）发展过程中的一个主要问题是其易受交叉轴耦合干扰影响。3D EFS每个传感轴的输出信号通常会被来自其他两个正交传感轴的电场分量耦合。本文提出了一种具有低交叉轴耦合干扰的一维（1D）电场传感器芯片（EFSC）。它被设计成对称的，形成一对平面内对称定位的传感结构。通过使用差分电路，1D EFSC能够沿着对称结构感应平行电场并消除交叉轴耦合干扰，这与先前报道的用于垂直电场分量测量的1D EFSC不同。因此，使用三个所提出的1D EFSC可以实现具有低交叉轴耦合干扰的3D EFS。这种3D EFS具有低交叉轴耦合干扰、尺寸小和集成度高的优点。开发了所提出的3D EFS的测试和校准系统。实验结果表明，在0 - 120 kV/m范围内，交叉轴灵敏度在5.48%以内，该3D EFS的总测量误差在6.16%以内。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/9a3d075e3e62/sensors-18-00870-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/9901b8419bd7/sensors-18-00870-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/037d8532699e/sensors-18-00870-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/dfd17bdf9558/sensors-18-00870-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/99c36bcd5de6/sensors-18-00870-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/2a2c0d530262/sensors-18-00870-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/f52f114a2e8d/sensors-18-00870-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/be2e54759fcc/sensors-18-00870-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/2c3afa9fedd5/sensors-18-00870-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/17c7b27046d0/sensors-18-00870-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/5424c14344ad/sensors-18-00870-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/9a3d075e3e62/sensors-18-00870-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/9901b8419bd7/sensors-18-00870-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/037d8532699e/sensors-18-00870-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/dfd17bdf9558/sensors-18-00870-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/99c36bcd5de6/sensors-18-00870-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/2a2c0d530262/sensors-18-00870-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/f52f114a2e8d/sensors-18-00870-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/be2e54759fcc/sensors-18-00870-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/2c3afa9fedd5/sensors-18-00870-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/17c7b27046d0/sensors-18-00870-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/5424c14344ad/sensors-18-00870-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/88d7/5877351/9a3d075e3e62/sensors-18-00870-g011.jpg

相似文献

1
Design, Fabrication and Characterization of a MEMS-Based Three-Dimensional Electric Field Sensor with Low Cross-Axis Coupling Interference.基于MEMS的低交叉轴耦合干扰三维电场传感器的设计、制造与表征
Sensors (Basel). 2018 Mar 15;18(3):870. doi: 10.3390/s18030870.
2
3D power frequency intensive electric field sensor based on a lithium niobate electro-optic crystal.基于铌酸锂电光晶体的三维工频强电场传感器
Appl Opt. 2024 Mar 1;63(7):1761-1768. doi: 10.1364/AO.514702.
3
Research on a Novel MEMS Sensor for Spatial DC Electric Field Measurements in an Ion Flows Field.用于离子流场中空间直流电场测量的新型 MEMS 传感器研究。
Sensors (Basel). 2018 May 28;18(6):1740. doi: 10.3390/s18061740.
4
A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology.一种基于玻璃通孔技术的灵敏度增强型垂直谐振微机电系统电场传感器。
Micromachines (Basel). 2024 Feb 29;15(3):356. doi: 10.3390/mi15030356.
5
A Decoupled Calibration Method Based on the Multi-Output Support Vector Regression Algorithm for Three-Dimensional Electric-Field Sensors.一种基于多输出支持向量回归算法的三维电场传感器解耦校准方法
Sensors (Basel). 2021 Dec 8;21(24):8196. doi: 10.3390/s21248196.
6
Fabrication and Characteristics of a SOI Three-Axis Acceleration Sensor Based on MEMS Technology.基于MEMS技术的SOI三轴加速度传感器的制作与特性
Micromachines (Basel). 2019 Apr 9;10(4):238. doi: 10.3390/mi10040238.
7
System Error Compensation Methodology Based on a Neural Network for a Micromachined Inertial Measurement Unit.基于神经网络的微机械惯性测量单元系统误差补偿方法
Sensors (Basel). 2016 Jan 29;16(2):175. doi: 10.3390/s16020175.
8
Fabrication Technology and Characteristics Research of a Monolithically-Integrated 2D Magnetic Field Sensor Based on Silicon Magnetic Sensitive Transistors.基于硅磁敏晶体管的整体集成二维磁场传感器的制作技术及特性研究。
Sensors (Basel). 2018 Aug 4;18(8):2551. doi: 10.3390/s18082551.
9
Multiaxis electric field sensing using slab coupled optical sensors.使用平板耦合光学传感器的多轴电场传感
Appl Opt. 2013 Mar 20;52(9):1968-77. doi: 10.1364/AO.52.001968.
10
A Piezoelectric-Piezoresistive Coupling Electric Field Sensor for Large Dynamic Range AC Electric Field Measurements.一种用于大动态范围交流电场测量的压电势耦合电场传感器。
Sensors (Basel). 2024 Jan 30;24(3):902. doi: 10.3390/s24030902.

引用本文的文献

1
A Review of Three-Dimensional Electric Field Sensors.三维电场传感器综述
Micromachines (Basel). 2025 Jun 24;16(7):737. doi: 10.3390/mi16070737.
2
A 3D DC Electric Field Meter Based on Sensor Chips Packaged Using a Highly Sensitive Scheme.一种基于采用高灵敏度方案封装的传感器芯片的三维直流电场计。
Micromachines (Basel). 2025 Apr 20;16(4):484. doi: 10.3390/mi16040484.
3
Spatial Decoupling Method for a Novel Dual-Orthogonal Induction MEMS Three-Dimensional Electric Field Sensor.一种新型双正交感应微机电系统三维电场传感器的空间解耦方法

本文引用的文献

1
A High Sensitivity Electric Field Microsensor Based on Torsional Resonance.一种基于扭转共振的高灵敏度电场微传感器。
Sensors (Basel). 2018 Jan 19;18(1):286. doi: 10.3390/s18010286.
2
Design and modeling of magnetically driven electric-field sensor for non-contact DC voltage measurement in electric power systems.电力系统中用于非接触式直流电压测量的磁驱动电场传感器的设计与建模
Rev Sci Instrum. 2016 Oct;87(10):105001. doi: 10.1063/1.4963852.
Micromachines (Basel). 2025 Mar 27;16(4):381. doi: 10.3390/mi16040381.
4
Wafer-Level Vacuum-Packaged Electric Field Microsensor: Structure Design, Theoretical Model, Microfabrication, and Characterization.晶圆级真空封装电场微传感器：结构设计、理论模型、微加工与表征
Micromachines (Basel). 2022 Jun 11;13(6):928. doi: 10.3390/mi13060928.
5
Resolution-Enhancing Structure for the Electric Field Microsensor Chip.电场微传感器芯片的分辨率增强结构。
Micromachines (Basel). 2021 Aug 7;12(8):936. doi: 10.3390/mi12080936.
6
Method for Localization Aerial Target in AC Electric Field Based on Sensor Circular Array.基于传感器圆形阵列的交流电场中空中目标定位方法。
Sensors (Basel). 2020 Mar 12;20(6):1585. doi: 10.3390/s20061585.
7
Research on a Novel MEMS Sensor for Spatial DC Electric Field Measurements in an Ion Flows Field.用于离子流场中空间直流电场测量的新型 MEMS 传感器研究。
Sensors (Basel). 2018 May 28;18(6):1740. doi: 10.3390/s18061740.