用于沉积硒化锌薄膜的二硫属元素亚氨基二膦酸锌配合物的气溶胶辅助化学气相沉积（AACVD）
Aerosol Assisted Chemical Vapour Deposition (AACVD) of Zinc dichalcogenoimidodiphosphinate Complexes for the Deposition of Zinc Selenide Thin Films.
作者信息
Oyetunde Temidayo, Omorogie Martins O, O'Brien Paul
机构信息
Department of Chemical Sciences, Faculty of Natural Sciences, Redeemer's University, P.M.B. 230, Ede, 232102, Nigeria.
School of Chemistry and School of Materials, The University of Manchester, Oxford Road, Manchester, M13 9PL, UK.
出版信息
ChemistryOpen. 2025 Jun;14(6):e202400295. doi: 10.1002/open.202400295. Epub 2024 Dec 4.
Dichalcogenoimidodiphosphinate complexes of zinc [Zn{(EPPr)N}], [E=Se,Se; S,Se] were synthesized through metathetical reactions from the dichalcogenoimidodiphosphinate ligands [(EE'PPrNH)] (E, E'=Se, Se; S, Se). These complexes were characterized and used as single-source precursors through Aerosol-Assisted Chemical Vapour Deposition (AACVD) for the deposition of cubic zinc selenide (ZnSe) films on glass substrates. The deposition temperature occurred at 500 and 525 °C, while the flow rates of the carrier gas was 160 and 240 standard cubic centimetre (sccm). The morphology of the deposited films ranged between dense fibrous network and woven fibres. X-ray photoelectron spectroscopy (XPS) confirmed the presence of the constituent elements in zinc selenide.
通过二硫属元素亚氨基二膦酸酯配体[(EE'PPrNH)]（E，E' = Se，Se；S，Se）的复分解反应合成了锌的二硫属元素亚氨基二膦酸酯配合物[Zn{(EPPr)N}]，[E = Se，Se；S，Se]。对这些配合物进行了表征，并通过气溶胶辅助化学气相沉积（AACVD）用作单源前驱体，以在玻璃基板上沉积立方硒化锌（ZnSe）薄膜。沉积温度为500和525°C，载气流量为160和240标准立方厘米（sccm）。沉积薄膜的形态介于致密的纤维网络和编织纤维之间。X射线光电子能谱（XPS）证实了硒化锌中组成元素的存在。
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