Ji Gangseon, Kim Hwan Sik, Cha Seong Ho, Lee Hyoung-Taek, Kim Hye Ju, Lee Sang Woon, Ahn Kwang Jun, Kim Kyoung-Ho, Ahn Yeong Hwan, Park Hyeong-Ryeol
Department of Physics, Ulsan National Institute of Science and Technology (UNIST), Ulsan 449419, Republic of Korea.
Department of Physics, Department of Energy Systems Research, Ajou University, Suwon 16499, Republic of Korea.
Nanophotonics. 2023 Jan 3;12(1):147-154. doi: 10.1515/nanoph-2022-0706. eCollection 2023 Jan.
We demonstrated an ultra-sensitive terahertz virus detection method combined with virus-sized gold nanogaps filled with AlO. Large-area high-density 20 nm-gap rectangular loop structures, containing a resonant frequency in the terahertz range, were fabricated on a 4-inch wafer using atomic layer lithography. When target viruses with a 60 nm diameter were located on the nanogaps, we observed a significant redshift of the resonant peak already with an average number of about 100 viruses per unit loop due to the strong field confinement and enhancement near the gap. Furthermore, when the virus was tightly attached to an etched gap like a bridge connecting metals, its sensitivity is doubled compared to the unetched gap, which resulted in 400% more resonance frequency shift per single virus particle than our previous work. Full-wave simulations and theoretical calculations based on modal expansions were in good agreement with the experiments, revealing that the resonant transmission spectrum was mostly determined by the change in refractive index in a two-dimensional-like optical hotspot near the nanogap. A further step could be taken to increase sensitivity by tuning nanogap-loops to the absorption frequencies associated with the intermolecular vibrational modes of the viruses and fingerprinting them as well.
我们展示了一种超灵敏的太赫兹病毒检测方法,该方法结合了填充有AlO的病毒大小的金纳米间隙。使用原子层光刻技术在4英寸晶圆上制备了大面积高密度的20纳米间隙矩形环结构,其共振频率在太赫兹范围内。当直径为60纳米的目标病毒位于纳米间隙上时,由于间隙附近的强场限制和增强,我们已经观察到共振峰出现显著红移,每单位环平均约有100个病毒。此外,当病毒像连接金属的桥一样紧密附着在蚀刻间隙上时,其灵敏度比未蚀刻间隙提高了一倍,这导致每个单个病毒颗粒的共振频率偏移比我们之前的工作多400%。基于模态展开的全波模拟和理论计算与实验结果吻合良好,表明共振透射光谱主要由纳米间隙附近二维类光学热点处的折射率变化决定。还可以进一步采取措施,通过将纳米间隙环调整到与病毒分子间振动模式相关的吸收频率并对其进行指纹识别来提高灵敏度。