Yu Aran, Kim Moohyuk, Song Da In, Park Byoung Jun, Jeong Hae Rin, You Byeong Uk, Jeon Seung-Woo, Han Sang-Wook, Kim Myung-Ki
KU-KIST Graduate School of Converging Science and Technology, Korea University, Seoul, 02841, Republic of Korea.
Mechatronics Research Center, SAMSUNG Electronics, Hwaseong 18448, Republic of Korea.
Nanophotonics. 2024 Apr 17;13(16):2903-2913. doi: 10.1515/nanoph-2023-0898. eCollection 2024 Jul.
Despite their excellent performance and versatility, the efficient integration of small lasers with other optical devices has long been hindered by their broad emission divergence. In this study, we introduce a novel approach for emission engineering in microdisk lasers, significantly enhancing their vertical emission output by directly integrating specially designed reflective metalenses, referred to as "meta-micromirrors". A 5 μm-diameter microdisk laser is precisely positioned at an 8 μm focal distance on a 30 × 30 μm meta-micromirror featuring a numerical aperture (NA) of 0.95, accomplished through micro-transfer printing techniques. Our experiments demonstrated a notable increase in the emission efficiency within an NA of 0.65. Specifically, we observed a 2.68-fold increase in the average emission from ten microdisk lasers. This integration not only enhances the emission efficiency of small lasers but also holds considerable implications for micro- and nano-photonic integrations. The results of this integration open up new possibilities in various fields, including photonic integrated circuits, bio-sensing technologies, and the development of quantum light sources.
尽管小型激光器具有出色的性能和多功能性,但其宽发射发散长期以来一直阻碍着它们与其他光学器件的有效集成。在本研究中,我们引入了一种用于微盘激光器发射工程的新方法,通过直接集成特殊设计的反射超透镜(称为“超微镜”),显著提高其垂直发射输出。一个直径5μm的微盘激光器通过微转移印刷技术精确地放置在一个数值孔径(NA)为0.95、尺寸为30×30μm的超微镜上,焦距为8μm。我们的实验表明,在NA为0.65的范围内,发射效率有显著提高。具体而言,我们观察到十个微盘激光器的平均发射增加了2.68倍。这种集成不仅提高了小型激光器的发射效率,而且对微纳光子集成也具有重要意义。这种集成的结果在包括光子集成电路、生物传感技术和量子光源开发在内的各个领域开辟了新的可能性。