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通过周期性亚波长孔图案化实现折射率传感的高灵敏度微盘激光传感器。

Highly sensitive microdisk laser sensor for refractive index sensing via periodic meta-hole patterning.

作者信息

Jeong Haerin, Park Nu-Ri, Park Byoung Jun, Kim Moohyuk, Kim Jin Tae, Kim Myung-Ki

机构信息

KU-KIST Graduate School of Converging Science and Technology, Korea University, Seoul 02841, Republic of Korea.

Quantum Technology Research Department, Electronics and Telecommunications Research Institute (ETRI), Daejeon 34129, Republic of Korea.

出版信息

Nanophotonics. 2025 Jan 30;14(8):1193-1202. doi: 10.1515/nanoph-2024-0598. eCollection 2025 Apr.

Abstract

Microdisk lasers have emerged as compact on-chip optical sensors due to their small size, simple structure, and efficient lasing capabilities. However, conventional microdisk laser sensors face challenges in enhancing interactions with external analytes, as their energy remains predominantly confined within the laser material. In this study, we present a novel microdisk laser sensor incorporating periodic meta-hole patterning, designed to enhance external interaction while maintaining the integrity of the whispering gallery mode (WGM). Numerical simulations show that in an InGaAsP microdisk laser (5 μm diameter, 250 nm thickness), the WGM remains stable with periodic meta-holes (period = 340 nm, diameter < 0.4), achieving a resonant wavelength near 1,500 nm. The inclusion of meta-holes led to a substantial improvement in sensitivity, reaching up to 100.8 nm/RIU - a 2.26-fold increase over nonpatterned microdisks. Experimental validation confirmed lasing in structures with a / ratio of 0.32, achieving a maximum sensitivity of 74.5 nm/RIU, which represents a 2.02-fold enhancement compared to nonpatterned designs. This advancement in microdisk laser design not only opens new possibilities for high-performance, miniaturized optical sensors but also holds significant potential for integration into next-generation on-chip sensing technologies.

摘要

微盘激光器因其尺寸小、结构简单和高效的激光发射能力,已成为紧凑型片上光学传感器。然而,传统的微盘激光传感器在增强与外部分析物的相互作用方面面临挑战,因为其能量主要局限于激光材料内部。在本研究中,我们展示了一种新型的微盘激光传感器,它采用了周期性的亚波长孔图案,旨在增强外部相互作用,同时保持回音壁模式(WGM)的完整性。数值模拟表明,在一个直径为5μm、厚度为250nm的InGaAsP微盘激光器中,带有周期性亚波长孔(周期 = 340nm,直径 < 0.4)时WGM保持稳定,实现了接近1500nm的共振波长。亚波长孔的加入使灵敏度有了显著提高,达到了100.8nm/RIU,比无图案的微盘提高了2.26倍。实验验证证实了在/比为0.32的结构中实现了激光发射,最大灵敏度达到74.5nm/RIU,与无图案设计相比提高了2.02倍。微盘激光设计的这一进展不仅为高性能、小型化光学传感器开辟了新的可能性,也为集成到下一代片上传感技术中具有巨大潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/896e/12019935/8abc754bef3b/j_nanoph-2024-0598_fig_001.jpg

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