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用于高通量3D纳米打印的光引发剂体系中的光活化聚合抑制过程。

Photo-activated polymerization inhibition process in photoinitiator systems for high-throughput 3D nanoprinting.

作者信息

Somers Paul, Liang Zihao, Chi Teng, Johnson Jason E, Pan Liang, Boudouris Bryan W, Xu Xianfan

机构信息

School of Mechanical Engineering and Birck Nanotechnology Center, Purdue University, West Lafayette, IN 47907, USA.

Charles D. Davidson School of Chemical Engineering, Purdue University, West Lafayette, IN 47907, USA.

出版信息

Nanophotonics. 2023 Jan 10;12(8):1571-1580. doi: 10.1515/nanoph-2022-0611. eCollection 2023 Apr.

Abstract

The systems for multiphoton 3D nanoprinting are rapidly increasing in print speed for larger throughput and scale, unfortunately without also improvement in resolution. Separately, the process of photoinhibition lithography has been demonstrated to enhance the resolution of multiphoton printing through the introduction of a secondary laser source. The photo-chemical dynamics and interactions for achieving photoinhibition in the various multiphoton photoinitiator systems are complex and still not well understood. Here, we examine the photoinhibition process of the common photoinitiator 7-diethylamino 3-thenoylcoumarin (DETC) with inhibition lasers near or at the multiphoton printing laser wavelength in typical low peak intensity, high repetition rate 3D nanoprinting processes. We demonstrate the clear inhibition of the polymerization process consistent with a triplet absorption deactivation mechanism for a DETC photoresist as well as show inhibition for several other photoresist systems. Additionally, we explore options to recover the photoinhibition process when printing with high intensity, low repetition rate lasers. Finally, we demonstrate photoinhibition in a projection multiphoton printing system. This investigation of photoinhibition lithography with common photoinitiators elucidates the possibility for photoinhibition occurring in many resist systems with typical high repetition rate multiphoton printing lasers as well as for high-speed projection multiphoton printing.

摘要

用于多光子3D纳米打印的系统正迅速提高打印速度以实现更高的产量和规模,但遗憾的是分辨率并未得到改善。另外,光抑制光刻工艺已被证明可通过引入二次激光源来提高多光子打印的分辨率。在各种多光子光引发剂系统中实现光抑制的光化学动力学和相互作用很复杂,目前仍未得到很好的理解。在此,我们研究了常见光引发剂7-二乙氨基-3-噻吩甲酰基香豆素(DETC)在典型的低峰值强度、高重复率3D纳米打印过程中,使用接近或处于多光子打印激光波长的抑制激光时的光抑制过程。我们证明了聚合过程受到明显抑制,这与DETC光刻胶的三重态吸收失活机制一致,并且还展示了对其他几种光刻胶系统的抑制作用。此外,我们探索了在使用高强度、低重复率激光进行打印时恢复光抑制过程的方法。最后,我们在投影多光子打印系统中展示了光抑制现象。这项对使用常见光引发剂的光抑制光刻的研究阐明了在许多光刻胶系统中,使用典型的高重复率多光子打印激光以及高速投影多光子打印时发生光抑制的可能性。

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