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通过基于有损电介质的法布里-珀罗腔结构实现多种结构颜色调整。

To realize a variety of structural color adjustments via lossy-dielectric-based Fabry-Perot cavity structure.

作者信息

Rahman Md Abdur, Kim Dong Kyu, Lee Jong-Kwon, Byun Ji Young

机构信息

Extreme Materials Research Center, Korea Institute of Science & Technology, 5, Hwarang-Ro 14-Gil, Seongbuk-Gu, Seoul 02792, Republic of Korea.

Division of Energy and Optical Technology Convergence, Cheongju University, Cheongju-Si, Chungcheongbuk-Do 28503, Republic of Korea.

出版信息

Nanophotonics. 2022 Nov 3;11(21):4855-4868. doi: 10.1515/nanoph-2022-0522. eCollection 2022 Dec.

Abstract

Structural colors with tunable properties have extensive applications in surface decoration, arts, absorbers, and optical filters. Planar structures have more advantages over other forms studied to date due to their easy manufacturability. Metal-insulator-metal-based structures are one of the known methods to fabricate structural colors where colors can be tuned mainly by the thickness of the intermediate lossless insulator layer. However, generating colors by MIM structure requires a thin metallic layer on top, and the top metals' abrasiveness and/or oxidation may degrade the colors quickly. Thus, we propose a lossy dielectric layer to replace the top metallic layer as a solution to ensure the structure's durability by preventing scratches and oxidation. Herein, CrON/SiN/Metal structures have been studied where theoretical investigations suggest that highly saturated colors can be generated in the lossy-lossless dielectric structures. Experimental data validated such simulations by revealing a range of vivid colors. Furthermore, these structures can easily achieve strong light absorption (SLA) even for a thick top layer of ∼100 nm. The colors realized by these structures are appeared due to a combination of the interference effect of the asymmetric Fabry-Perot cavity structure and the absorption rate in the CrO N layer.

摘要

具有可调谐特性的结构色在表面装饰、艺术、吸收器和光学滤波器等领域有着广泛的应用。平面结构由于其易于制造,相较于迄今研究的其他形式具有更多优势。基于金属-绝缘体-金属的结构是制造结构色的已知方法之一,其中颜色主要可通过中间无损绝缘层的厚度来调节。然而,通过金属-绝缘体-金属结构产生颜色需要在顶部有一层薄金属层,而顶部金属的耐磨性和/或氧化性可能会使颜色迅速退化。因此,我们提出用有损介电层代替顶部金属层作为一种解决方案,通过防止刮擦和氧化来确保结构的耐久性。在此,对CrON/SiN/金属结构进行了研究,理论研究表明在有损-无损介电结构中可以产生高饱和度的颜色。实验数据通过揭示一系列鲜艳的颜色验证了此类模拟。此外,即使对于约100纳米厚的顶层,这些结构也能轻松实现强光吸收(SLA)。这些结构实现的颜色是由于不对称法布里-珀罗腔结构的干涉效应与CrON层中的吸收率共同作用而出现的。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6805/11502086/bbf88d66229e/j_nanoph-2022-0522_fig_001.jpg

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