Cañón-Bermúdez Juan David, Mulcué-Nieto Luis Fernando
Departamento de Física y Química, Facultad de Ciencias Exactas y Naturales, Universidad Nacional de Colombia Sede Manizales, Carrera 27 # 64-60, Manizales, 176007, Colombia.
Escuela de Ciencias Básicas, Tecnologías e Ingenierías, Universidad Nacional Abierta y a Distancia UNAD, Diagonal 25 F Carrera 23, Dosquebradas, 661001, Colombia.
Heliyon. 2024 Nov 14;10(22):e40322. doi: 10.1016/j.heliyon.2024.e40322. eCollection 2024 Nov 30.
InAlN semiconductor alloy is a promising option for the fabrication of optoelectronic devices, such as high efficiency solar cells, due to its wide variable bandgap, from 0.64 eV to 6.2 eV. Traditionally, the production of high quality InAlN has been achieved by techniques such as MBE (Molecular Beam Epitaxy) and MOCVD (Chemical Vapor Deposition), which are complex and require high energy consumption. In contrast, sputtering is presented as a simpler, cheaper, and more industrially scalable technique, allowing the production of InAlN thin films with good structural quality. This study investigates the physical properties of InAlN layers to evaluate their potential in photovoltaic applications. Recent advances and challenges in the use of InAlN as an absorber layer in solar cells are discussed. In addition, critical parameters of the sputtering process, including target power, working pressure, gas flow ratio, substrate temperature, source type and number of cathodes and their influence on material properties are explored. These conditions are discussed along with their impact on the quality of InAlN thin films to enhance their application in photovoltaics and other emerging technology areas.
氮化铟铝(InAlN)半导体合金因其0.64电子伏特至6.2电子伏特的宽可变带隙,是制造光电器件(如高效太阳能电池)的一个有前景的选择。传统上,高质量氮化铟铝的生产是通过分子束外延(MBE)和化学气相沉积(MOCVD)等技术实现的,这些技术复杂且能耗高。相比之下,溅射作为一种更简单、更便宜且在工业上更具可扩展性的技术,可以生产出具有良好结构质量的氮化铟铝薄膜。本研究调查了氮化铟铝层的物理性质,以评估其在光伏应用中的潜力。讨论了在太阳能电池中使用氮化铟铝作为吸收层的最新进展和挑战。此外,还探讨了溅射工艺的关键参数,包括靶功率、工作压力、气体流量比、衬底温度、源类型和阴极数量及其对材料性能的影响。讨论了这些条件及其对氮化铟铝薄膜质量的影响,以增强其在光伏和其他新兴技术领域的应用。