Wang Mengting, Huang Jianqiu, Huang Qing-An
Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, 210096, China.
Microsyst Nanoeng. 2024 Dec 24;10(1):202. doi: 10.1038/s41378-024-00847-6.
Piezoelectric resonance sensors are essential to many diverse applications associated with chemical and biological sensing. In general, they rely on continuously detecting the resonant frequency shift of piezoelectric resonators due to analytes accreting on their surfaces in vacuum, gas or fluid. Resolving the small analyte changes requires the resonators with a high quality factor. Here, we propose theoretically and demonstrate experimentally a scheme using a physics concept, i.e., a Fano resonance, to enhance the quality factor rather than optimizing the structure and material of the resonator itself though these are important. The Fano resonance arises due to the interference between a discrete mode and a continuum of modes, leading to the asymmetric and steep dispersion. In our scheme, the as-fabricated piezoelectric sensors are put into the Fano resonance by connecting an external shunt capacitor to them. As a verification case, one-port surface acoustic wave (SAW) resonators on LiNbO substrate, incorporating a composite of polymethyl methacrylate (PMMA) and graphene oxide (GO) for humidity sensing, have been fabricated and characterized. We enhance the quality factor by up to a factor of about 8, from 929 for the as-fabricated sensor to 7682 for that with the external shunt capacitor. Our results pave the way for the practical development of piezoelectric resonance sensors with high quality factor.
压电共振传感器对于许多与化学和生物传感相关的不同应用至关重要。一般来说,它们依靠在真空、气体或流体环境中持续检测由于分析物附着在其表面而导致的压电谐振器的共振频率偏移。要分辨出分析物的微小变化,需要高品质因数的谐振器。在此,我们从理论上提出并通过实验证明了一种方案,即利用一种物理概念,也就是法诺共振,来提高品质因数,而不是通过优化谐振器本身的结构和材料,尽管这些也很重要。法诺共振是由于离散模式与连续模式之间的干涉而产生的,会导致不对称且陡峭的色散。在我们的方案中,通过给已制作好的压电传感器连接一个外部并联电容器,使其进入法诺共振状态。作为一个验证案例,我们制作并表征了基于铌酸锂(LiNbO)衬底的单端口表面声波(SAW)谐振器,该谐振器采用聚甲基丙烯酸甲酯(PMMA)和氧化石墨烯(GO)的复合材料用于湿度传感。我们将品质因数提高了约8倍,从制作好的传感器的929提高到连接外部并联电容器后的7682。我们的结果为高品质因数压电共振传感器的实际开发铺平了道路。