• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利:CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法,用中文像聊天一样搜索,搜遍4000万医学文献。AI智能推荐,让科研检索更轻松。

立即免费搜索

文件翻译

保留排版,准确专业,支持PDF/Word/PPT等文件格式,支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述,25分钟生成高质量综述,智能提取关键信息,辅助科研写作。

立即免费体验

将压电传感器应用于法诺共振。

Putting piezoelectric sensors into Fano resonances.

作者信息

Wang Mengting, Huang Jianqiu, Huang Qing-An

机构信息

Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, 210096, China.

出版信息

Microsyst Nanoeng. 2024 Dec 24;10(1):202. doi: 10.1038/s41378-024-00847-6.

DOI:10.1038/s41378-024-00847-6
PMID:39719434
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11668863/
Abstract

Piezoelectric resonance sensors are essential to many diverse applications associated with chemical and biological sensing. In general, they rely on continuously detecting the resonant frequency shift of piezoelectric resonators due to analytes accreting on their surfaces in vacuum, gas or fluid. Resolving the small analyte changes requires the resonators with a high quality factor. Here, we propose theoretically and demonstrate experimentally a scheme using a physics concept, i.e., a Fano resonance, to enhance the quality factor rather than optimizing the structure and material of the resonator itself though these are important. The Fano resonance arises due to the interference between a discrete mode and a continuum of modes, leading to the asymmetric and steep dispersion. In our scheme, the as-fabricated piezoelectric sensors are put into the Fano resonance by connecting an external shunt capacitor to them. As a verification case, one-port surface acoustic wave (SAW) resonators on LiNbO substrate, incorporating a composite of polymethyl methacrylate (PMMA) and graphene oxide (GO) for humidity sensing, have been fabricated and characterized. We enhance the quality factor by up to a factor of about 8, from 929 for the as-fabricated sensor to 7682 for that with the external shunt capacitor. Our results pave the way for the practical development of piezoelectric resonance sensors with high quality factor.

摘要

压电共振传感器对于许多与化学和生物传感相关的不同应用至关重要。一般来说,它们依靠在真空、气体或流体环境中持续检测由于分析物附着在其表面而导致的压电谐振器的共振频率偏移。要分辨出分析物的微小变化,需要高品质因数的谐振器。在此,我们从理论上提出并通过实验证明了一种方案,即利用一种物理概念,也就是法诺共振,来提高品质因数,而不是通过优化谐振器本身的结构和材料,尽管这些也很重要。法诺共振是由于离散模式与连续模式之间的干涉而产生的,会导致不对称且陡峭的色散。在我们的方案中,通过给已制作好的压电传感器连接一个外部并联电容器,使其进入法诺共振状态。作为一个验证案例,我们制作并表征了基于铌酸锂(LiNbO)衬底的单端口表面声波(SAW)谐振器,该谐振器采用聚甲基丙烯酸甲酯(PMMA)和氧化石墨烯(GO)的复合材料用于湿度传感。我们将品质因数提高了约8倍,从制作好的传感器的929提高到连接外部并联电容器后的7682。我们的结果为高品质因数压电共振传感器的实际开发铺平了道路。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/746f/11668863/a512491c19df/41378_2024_847_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/746f/11668863/00e717ea15a1/41378_2024_847_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/746f/11668863/b8496b5b7e96/41378_2024_847_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/746f/11668863/a512491c19df/41378_2024_847_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/746f/11668863/00e717ea15a1/41378_2024_847_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/746f/11668863/b8496b5b7e96/41378_2024_847_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/746f/11668863/a512491c19df/41378_2024_847_Fig3_HTML.jpg

相似文献

1
Putting piezoelectric sensors into Fano resonances.将压电传感器应用于法诺共振。
Microsyst Nanoeng. 2024 Dec 24;10(1):202. doi: 10.1038/s41378-024-00847-6.
2
Fano resonances based on multimode and degenerate mode interference in plasmonic resonator system.基于等离子体谐振器系统中多模和简并模干涉的法诺共振。
Opt Express. 2017 Feb 20;25(4):3525-3533. doi: 10.1364/OE.25.003525.
3
Experimental evidence of Fano resonances in nanomechanical resonators.纳米机械谐振器中Fano共振的实验证据。
Sci Rep. 2017 Apr 21;7(1):1065. doi: 10.1038/s41598-017-01147-y.
4
Fano resonances in THz metamaterials composed of continuous metallic wires and split ring resonators.由连续金属线和裂环谐振器组成的太赫兹超材料中的法诺共振。
Opt Express. 2014 Nov 3;22(22):26572-84. doi: 10.1364/OE.22.026572.
5
Fano-Like Acoustic Resonance for Subwavelength Directional Sensing: 0-360 Degree Measurement.用于亚波长方向传感的类法诺声学共振:0 - 360度测量
Adv Sci (Weinh). 2020 Jan 27;7(6):1903101. doi: 10.1002/advs.201903101. eCollection 2020 Mar.
6
Graphene Multiple Fano Resonances Based on Asymmetric Hybrid Metamaterial.基于非对称混合超材料的石墨烯多重法诺共振
Nanomaterials (Basel). 2020 Dec 2;10(12):2408. doi: 10.3390/nano10122408.
7
Monolayer graphene sensing enabled by the strong Fano-resonant metasurface.强范诺共振超表面实现的单层石墨烯传感
Nanoscale. 2016 Oct 6;8(39):17278-17284. doi: 10.1039/c6nr01911k.
8
Modulating the Performance of the SAW Strain Sensor Based on Dual-Port Resonator Using FEM Simulation.基于有限元模拟的双端口谐振器声表面波应变传感器性能调制
Materials (Basel). 2023 Apr 21;16(8):3269. doi: 10.3390/ma16083269.
9
Chemical sensor based on surface acoustic wave resonator using Langmuir-Blodgett film.基于使用朗缪尔-布洛杰特膜的表面声波谐振器的化学传感器。
IEEE Trans Ultrason Ferroelectr Freq Control. 1998;45(5):1261-5. doi: 10.1109/58.726452.
10
Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator.基于嵌入式微通道体声波谐振器的超灵敏液体传感器。
Microsyst Nanoeng. 2024 Oct 11;10(1):143. doi: 10.1038/s41378-024-00790-6.

引用本文的文献

1
MOF-Based Bioelectronic Supercapacitors.基于金属有机框架的生物电子超级电容器
Small. 2025 Apr;21(15):e2412846. doi: 10.1002/smll.202412846. Epub 2025 Mar 6.

本文引用的文献

1
Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors.用于谐振传感器中明确频率锁定的复制光谱基线
Sensors (Basel). 2024 Apr 5;24(7):2318. doi: 10.3390/s24072318.
2
Piezoelectric biosensors: shedding light on principles and applications.压电生物传感器:原理与应用解析。
Mikrochim Acta. 2024 Mar 7;191(4):184. doi: 10.1007/s00604-024-06257-9.
3
Quartz crystal microbalance in soft and biological interfaces.石英晶体微天平在软质和生物界面中的应用。
Biointerphases. 2024 Jan 1;19(1). doi: 10.1116/6.0003312.
4
Recent advances of surface acoustic wave-based sensors for noninvasive cell analysis.用于无创细胞分析的基于表面声波的传感器的最新进展。
Curr Opin Biotechnol. 2023 Feb;79:102879. doi: 10.1016/j.copbio.2022.102879. Epub 2023 Jan 10.
5
Practical Use of Quartz Crystal Microbalance Monitoring in Cartilage Tissue Engineering.石英晶体微天平监测在软骨组织工程中的实际应用
J Funct Biomater. 2022 Sep 21;13(4):159. doi: 10.3390/jfb13040159.
6
Studying Soft Interfaces with Shear Waves: Principles and Applications of the Quartz Crystal Microbalance (QCM).利用剪切波研究软界面:石英晶体微天平(QCM)的原理与应用
Sensors (Basel). 2021 May 17;21(10):3490. doi: 10.3390/s21103490.
7
On the Performance Evaluation of Commercial SAW Resonators by Means of a Direct and Reliable Equivalent-Circuit Extraction.基于直接可靠的等效电路提取法对商用声表面波谐振器的性能评估
Micromachines (Basel). 2021 Mar 14;12(3):303. doi: 10.3390/mi12030303.
8
Dissipation Analysis Methods and Q-Enhancement Strategies in Piezoelectric MEMS Laterally Vibrating Resonators: A Review.压电微机电系统横向振动谐振器中的耗散分析方法与品质因数增强策略综述
Sensors (Basel). 2020 Sep 2;20(17):4978. doi: 10.3390/s20174978.
9
Lateral field excited quartz crystal microbalances for biosensing applications.横向场激励石英晶体微天平在生物传感中的应用。
Biointerphases. 2020 Jun 2;15(3):030801. doi: 10.1116/6.0000144.
10
Optimization of SAW Devices with LGS/Pt Structure for Sensing Temperature.用于温度传感的具有LGS/Pt结构的声表面波器件的优化
Sensors (Basel). 2020 Apr 25;20(9):2441. doi: 10.3390/s20092441.