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基于Ni/β-GaO垂直肖特基势垒二极管的高性能日盲紫外光电探测器

High-Performance Solar-Blind Ultraviolet Photodetectors Based on a Ni/β-GaO Vertical Schottky Barrier Diode.

作者信息

Fang Cizhe, Li Tongzhou, Shao Yao, Wang Yibo, Hu Haodong, Yang Jiayong, Zeng Xiangyu, Li Xiaoxi, Wang Di, Ding Yian, Liu Yan, Hao Yue, Han Genquan

机构信息

Hangzhou Institute of Technology, Xidian University, Hangzhou 311200, China.

School of Microelectronics, Xidian University, Xi'an 710071, China.

出版信息

Nano Lett. 2025 Jan 15;25(2):914-921. doi: 10.1021/acs.nanolett.4c05997. Epub 2025 Jan 6.

Abstract

GaO Schottky photodiodes are being actively explored for solar-blind ultraviolet (SBUV) detection, owing to the fast photoresponse and easy fabrication. However, their performance, limited by the Schottky contact, mostly underperforms the expectations. Herein, a Ni/β-GaO vertical Schottky barrier diode (SBD) with an ultrathin anode electrode is demonstrated. Through simple surface treatment, the quality of the Schottky junction is improved, thus the detection performance. The dark current reaches a record of less than 12 fA. Benefiting from this, an ultrahigh photo-to-dark current ratio (PDCR) of 4.92 × 10 and specific detectivity * of 2.76 × 10 Jones are achieved. The response time is also reduced to the order of milliseconds. The experimental result shows that the device still works properly at a high temperature of 150 °C. Most importantly, the fabricated photodetectors have good uniformity and operational stability. Our results provide a simple approach to mass produce high-performance GaO photodetectors, holding tremendous potential for UV imaging applications.

摘要

由于具有快速的光响应和易于制造的特点,氧化镓肖特基光电二极管正被积极探索用于日盲紫外(SBUV)探测。然而,其性能受肖特基接触的限制,大多未达预期。在此,展示了一种具有超薄阳极电极的Ni/β-GaO垂直肖特基势垒二极管(SBD)。通过简单的表面处理,肖特基结的质量得到改善,进而提升了探测性能。暗电流达到了小于12 fA的记录。受益于此,实现了4.92×10的超高光暗电流比(PDCR)以及2.76×10琼斯的比探测率*。响应时间也缩短至毫秒级。实验结果表明,该器件在150°C的高温下仍能正常工作。最重要的是,所制备的光电探测器具有良好的均匀性和运行稳定性。我们的结果提供了一种大规模生产高性能氧化镓光电探测器的简单方法,在紫外成像应用方面具有巨大潜力。

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