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磁电体声波和表面声波器件综述

Magnetoelectric BAW and SAW Devices: A Review.

作者信息

Luo Bin, Velvaluri Prasanth, Liu Yisi, Sun Nian-Xiang

机构信息

Electrical and Computer Engineering Department, Northeastern University, Boston, MA 02115, USA.

出版信息

Micromachines (Basel). 2024 Dec 3;15(12):1471. doi: 10.3390/mi15121471.

Abstract

Magnetoelectric (ME) devices combining piezoelectric and magnetostrictive materials have emerged as powerful tools to miniaturize and enhance sensing and communication technologies. This paper examines recent developments in bulk acoustic wave (BAW) and surface acoustic wave (SAW) ME devices, which demonstrate unique capabilities in ultra-sensitive magnetic sensing, compact antennas, and quantum applications. Leveraging the mechanical resonance of BAW and SAW modes, ME sensors achieve the femto- to pico-Tesla sensitivity ideal for biomedical applications, while ME antennas, operating at acoustic resonance, allow significant size reduction, with high radiation gain and efficiency, which is suited for bandwidth-restricted applications. In addition, ME non-reciprocal magnetoacoustic devices using hybrid magnetoacoustic waves present novel solutions for RF isolation, which have also shown potential for the efficient control of quantum defects, such as negatively charged nitrogen-vacancy (NV) centers. Continued advancements in materials and device structures are expected to further enhance ME device performance, positioning them as key components in future bio-sensing, wireless communication, and quantum information technologies.

摘要

结合压电材料和磁致伸缩材料的磁电(ME)器件已成为使传感和通信技术小型化并增强其性能的强大工具。本文研究了体声波(BAW)和表面声波(SAW)磁电器件的最新进展,这些器件在超灵敏磁传感、紧凑型天线和量子应用方面展现出独特的能力。利用BAW和SAW模式的机械共振,ME传感器实现了对生物医学应用理想的飞特斯拉至皮特斯拉灵敏度,而在声共振下工作的ME天线可大幅减小尺寸,同时具有高辐射增益和效率,适用于带宽受限的应用。此外,使用混合磁声波的ME非互易磁声器件为射频隔离提供了新颖的解决方案,还显示出对量子缺陷(如带负电荷的氮空位(NV)中心)进行有效控制的潜力。预计材料和器件结构的持续进步将进一步提升ME器件的性能,使其成为未来生物传感、无线通信和量子信息技术的关键组件。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b2e8/11677952/ac550a03fe04/micromachines-15-01471-g001.jpg

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