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基于磁电复合薄膜的器件的最新进展

Recent Progress in Devices Based on Magnetoelectric Composite Thin Films.

作者信息

Patil Deepak Rajaram, Kumar Ajeet, Ryu Jungho

机构信息

School of Materials Science and Engineering, Yeungnam University, Gyeongsan 38541, Korea.

出版信息

Sensors (Basel). 2021 Nov 30;21(23):8012. doi: 10.3390/s21238012.

Abstract

The strain-driven interfacial coupling between the ferromagnetic and ferroelectric constituents of magnetoelectric (ME) composites makes them potential candidates for novel multifunctional devices. ME composites in the form of thin-film heterostructures show promising applications in miniaturized ME devices. This article reports the recent advancement in ME thin-film devices, such as highly sensitive magnetic field sensors, ME antennas, integrated tunable ME inductors, and ME band-pass filters, is discussed. (PbZr)TiO (PZT), Pb(MgNb)O-PbTiO (PMN-PT), Aluminium nitride (AlN), and AlScN are the most commonly used piezoelectric constituents, whereas FeGa, FeGaB, FeCo, FeCoB, and Metglas (FeCoSiB alloy) are the most commonly used magnetostrictive constituents in the thin film ME devices. The ME field sensors offer a limit of detection in the fT/Hz range at the mechanical resonance frequency. However, below resonance, different frequency conversion techniques with AC magnetic or electric fields or the delta-E effect are used. Noise floors of 1-100 pT/Hz at 1 Hz were obtained. Acoustically actuated nanomechanical ME antennas operating at a very-high frequency as well as ultra-high frequency (0.1-3 GHz) range, were introduced. The ME antennas were successfully miniaturized by a few orders smaller in size compared to the state-of-the-art conventional antennas. The designed antennas exhibit potential application in biomedical devices and wearable antennas. Integrated tunable inductors and band-pass filters tuned by electric and magnetic field with a wide operating frequency range are also discussed along with miniaturized ME energy harvesters.

摘要

磁电(ME)复合材料中铁磁和铁电成分之间的应变驱动界面耦合使其成为新型多功能器件的潜在候选材料。薄膜异质结构形式的ME复合材料在小型化ME器件中显示出广阔的应用前景。本文报道了ME薄膜器件的最新进展,讨论了诸如高灵敏度磁场传感器、ME天线、集成可调谐ME电感器和ME带通滤波器等。(PbZr)TiO(PZT)、Pb(MgNb)O-PbTiO(PMN-PT)、氮化铝(AlN)和AlScN是最常用的压电成分,而FeGa、FeGaB、FeCo、FeCoB和Metglas(FeCoSiB合金)是薄膜ME器件中最常用的磁致伸缩成分。ME场传感器在机械共振频率下的检测限为fT/Hz范围。然而,在共振频率以下,则使用具有交流磁场或电场的不同频率转换技术或Δ-E效应。在1Hz时获得了1-100pT/Hz的本底噪声。介绍了在甚高频以及超高频(0.1-3GHz)范围内工作的声驱动纳米机械ME天线。与最先进的传统天线相比,ME天线成功地实现了尺寸缩小几个数量级。所设计的天线在生物医学设备和可穿戴天线中显示出潜在的应用价值。还讨论了由电场和磁场调谐的具有宽工作频率范围的集成可调谐电感器和带通滤波器以及小型化的ME能量收集器。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a1c3/8659927/275545beff6d/sensors-21-08012-g001.jpg

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