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一种基于机械共振的低频微机电系统磁电天线。

A Low-Frequency MEMS Magnetoelectric Antenna Based on Mechanical Resonance.

作者信息

Wang Yinan, Ma Zhibo, Fu Guanglei, Wang Jiayan, Xi Qi, Wang Yuanhang, Jia Ziqiang, Zi Guhao

机构信息

The Ministry of Education Key Lab of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, Ministry of Education, Xi'an 710072, China.

Shaan'xi Key Lab of MEMS/NEMS, Northwestern Polytechnical University, Xi'an 710072, China.

出版信息

Micromachines (Basel). 2022 May 30;13(6):864. doi: 10.3390/mi13060864.

DOI:10.3390/mi13060864
PMID:35744478
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9228862/
Abstract

Antenna miniaturization technology has been a challenging problem in the field of antenna design. The demand for antenna miniaturization is even stronger because of the larger size of the antenna in the low-frequency band. In this paper, we consider MEMS magnetoelectric antennas based on mechanical resonance, which sense the magnetic fields of electromagnetic waves through the magnetoelectric (ME) effect at their mechanical resonance frequencies, giving a voltage output. A 70 μm diameter cantilever disk with SiO/Cr/Au/AlN/Cr/Au/FeGaB stacked layers is prepared on a 300 μm silicon wafer using the five-masks micromachining process. The MEMS magnetoelectric antenna showed a giant ME coefficient is 2.928 kV/cm/Oe in mechanical resonance at 224.1 kHz. In addition, we demonstrate the ability of this MEMS magnetoelectric antenna to receive low-frequency signals. This MEMS magnetoelectric antenna can provide new ideas for miniaturization of low-frequency wireless communication systems. Meanwhile, it has the potential to detect weak electromagnetic field signals.

摘要

天线小型化技术一直是天线设计领域中一个具有挑战性的问题。由于低频段天线尺寸较大，对天线小型化的需求更为迫切。在本文中，我们考虑基于机械共振的微机电系统（MEMS）磁电天线，其在机械共振频率下通过磁电（ME）效应感知电磁波的磁场，从而产生电压输出。采用五掩膜微加工工艺在300μm厚的硅片上制备了直径为70μm、具有SiO/Cr/Au/AlN/Cr/Au/FeGaB堆叠层的悬臂圆盘。该MEMS磁电天线在224.1kHz的机械共振频率下展现出2.928kV/cm/Oe的巨大ME系数。此外，我们展示了这种MEMS磁电天线接收低频信号的能力。这种MEMS磁电天线可为低频无线通信系统的小型化提供新思路。同时，它具有检测微弱电磁场信号的潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/b49aa271e02e/micromachines-13-00864-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/8f3730e66669/micromachines-13-00864-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/324faa8a4d47/micromachines-13-00864-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/35661d0b805f/micromachines-13-00864-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/71b5bfb40723/micromachines-13-00864-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/2fa9ef7a3cef/micromachines-13-00864-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/958513c82c9d/micromachines-13-00864-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/b49aa271e02e/micromachines-13-00864-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/8f3730e66669/micromachines-13-00864-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/324faa8a4d47/micromachines-13-00864-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/35661d0b805f/micromachines-13-00864-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/71b5bfb40723/micromachines-13-00864-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/2fa9ef7a3cef/micromachines-13-00864-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/958513c82c9d/micromachines-13-00864-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3ba2/9228862/b49aa271e02e/micromachines-13-00864-g007.jpg

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Design and Optimization of a BAW Magnetic Sensor Based on Magnetoelectric Coupling.基于磁电耦合的BAW磁传感器的设计与优化
Micromachines (Basel). 2022 Jan 28;13(2):206. doi: 10.3390/mi13020206.
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Ultra-compact dual-band smart NEMS magnetoelectric antennas for simultaneous wireless energy harvesting and magnetic field sensing.超紧凑双频智能 NEMS 磁电天线，用于同时进行无线能量收集和磁场感应。
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