Chen Yupeng, Lv Jinguang, Zhao Baixuan, Zhao Yingze, Zheng Kaifeng, Qin Yuxin, Wang Weibiao, Nie Haitao, Yue Wei, Liang Jingqiu
Opt Express. 2025 Jan 27;33(2):3637-3653. doi: 10.1364/OE.547797.
Scientific-grade spectrometers with high hyperspectral resolution and high spectral accuracy are desirable in miniaturized optical systems to maintain stable and real-time spectral sampling. Fourier transform spectrometers that utilize high-precision moving mirrors generally struggle to enhance their miniaturization and stable real-time performance. A static infrared spectral measurement method is proposed that uses micro/nano-optical devices as the core of static interference and lightweight imaging. The use of micro/nano step mirrors allows for the instantaneous sampling of spectra. By employing an array of micro/nano lenses, interference imaging for each spectral channel can be accomplished. The spectrometer's all-static micro/nano-optical structure results in a reduction in volume and weight of more than half. Enhanced precision in design and fabrication is achieved through optical error analysis via a full-linkage optical field transmission model. An image edge detection-assisted spectral inversion algorithm is proposed, and the sampling stability and reconstruction accuracy are verified. The repeatability accuracy of interference intensity sampling surpasses 2%, and the peak accuracy of the reconstructed spectrum exceeds the resolution.
在小型化光学系统中，需要具有高光谱分辨率和高光谱精度的科学级光谱仪，以保持稳定和实时的光谱采样。利用高精度移动镜的傅里叶变换光谱仪通常难以提高其小型化和稳定实时性能。本文提出一种静态红外光谱测量方法，该方法以微纳光学器件为静态干涉和轻量成像的核心。使用微纳阶梯镜可实现光谱的瞬时采样。通过采用微纳透镜阵列，可完成每个光谱通道的干涉成像。该光谱仪的全静态微纳光学结构使体积和重量减少一半以上。通过全链路光场传输模型进行光学误差分析，提高了设计和制造精度。提出了一种图像边缘检测辅助光谱反演算法，并验证了采样稳定性和重建精度。干涉强度采样的重复性精度超过2%，重建光谱的峰值精度超过分辨率。
