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用于紧凑型傅里叶变换波导光谱仪的集成光电探测器。

Integrated photodetectors for compact Fourier-transform waveguide spectrometers.

作者信息

Grotevent Matthias J, Yakunin Sergii, Bachmann Dominik, Romero Carolina, Vázquez de Aldana Javier R, Madi Matteo, Calame Michel, Kovalenko Maksym V, Shorubalko Ivan

机构信息

Department of Chemistry and Applied Biosciences, ETH Zurich, Zurich, Switzerland.

Transport at Nanoscale Interfaces Laboratory, Swiss Federal Laboratories for Materials Science and Technology (Empa), Duebendorf, Switzerland.

出版信息

Nat Photonics. 2023;17(1):59-64. doi: 10.1038/s41566-022-01088-7. Epub 2022 Oct 24.

DOI:10.1038/s41566-022-01088-7
PMID:36628352
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9822831/
Abstract

Extreme miniaturization of infrared spectrometers is critical for their integration into next-generation consumer electronics, wearables and ultrasmall satellites. In the infrared, there is a necessary compromise between high spectral bandwidth and high spectral resolution when miniaturizing dispersive elements, narrow band-pass filters and reconstructive spectrometers. Fourier-transform spectrometers are known for their large bandwidth and high spectral resolution in the infrared; however, they have not been fully miniaturized. Waveguide-based Fourier-transform spectrometers offer a low device footprint, but rely on an external imaging sensor such as bulky and expensive InGaAs cameras. Here we demonstrate a proof-of-concept miniaturized Fourier-transform waveguide spectrometer that incorporates a subwavelength and complementary-metal-oxide-semiconductor-compatible colloidal quantum dot photodetector as a light sensor. The resulting spectrometer exhibits a large spectral bandwidth and moderate spectral resolution of 50 cm at a total active spectrometer volume below 100 μm × 100 μm × 100 μm. This ultracompact spectrometer design allows the integration of optical/analytical measurement instruments into consumer electronics and space devices.

摘要

红外光谱仪的极致小型化对于将其集成到下一代消费电子产品、可穿戴设备和超小型卫星中至关重要。在红外领域，在对色散元件、窄带通滤波器和重构光谱仪进行小型化时，高光谱带宽和高光谱分辨率之间存在必要的权衡。傅里叶变换光谱仪在红外波段以其大带宽和高光谱分辨率而闻名；然而，它们尚未完全实现小型化。基于波导的傅里叶变换光谱仪具有较小的设备占地面积，但依赖于外部成像传感器，如体积庞大且昂贵的铟镓砷相机。在此，我们展示了一种概念验证型小型化傅里叶变换波导光谱仪，它集成了一个亚波长且与互补金属氧化物半导体兼容的胶体量子点光电探测器作为光传感器。所得光谱仪在总有效光谱仪体积低于100μm×100μm×100μm的情况下，展现出大光谱带宽和50cm的中等光谱分辨率。这种超紧凑的光谱仪设计允许将光学/分析测量仪器集成到消费电子产品和太空设备中。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dce3/9822831/b63b16a5298d/41566_2022_1088_Fig13_ESM.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dce3/9822831/236f2e37c6b9/41566_2022_1088_Fig7_ESM.jpg
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