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利用双极型硅纳米线晶体管传感器检测二氧化氮

Nitrogen Dioxide Detection with Ambipolar Silicon Nanowire Transistor Sensors.

作者信息

Vardhan Vaishali, Biswas Subhajit, Ghosh Sayantan, Tsetseris Leonidas, Hellebust S, Echresh Ahmad, Georgiev Yordan M, Holmes Justin D

机构信息

School of Chemistry, University College Cork, Cork T12 YN60, Ireland.

AMBER Centre, Environmental Research Institute, University College Cork, Cork T23 XE10, Ireland.

出版信息

ACS Appl Mater Interfaces. 2025 Feb 12;17(6):9539-9553. doi: 10.1021/acsami.4c18322. Epub 2025 Jan 31.

Abstract

Si nanowire transistors are ideal for the sensitive detection of atmospheric species due to their enhanced sensitivity to changes in the electrostatic potential at the channel surface. In this study, we present unique ambipolar Si junctionless nanowire transistors (Si-JNTs) that incorporate both - and -type conduction within a single device. These transistors enable scalable detection of nitrogen dioxide (NO), a critical atmospheric oxidative pollutant, across a broad concentration range, from high levels (25-50 ppm) to low levels (250 ppb-2 ppm). Acting as an electron acceptor, NO generates holes and functions as a pseudodopant for Si-JNTs, altering the conductance and other device parameters. Consequently, ambipolar Si-JNTs exhibit a dual response at room temperature, reacting on both - and -conduction channels when exposed to gaseous NO, thereby offering a larger parameter space compared to a unipolar device. Key characteristics of the Si-JNTs, including on-current (), threshold voltage () and mobility (μ), were observed to dynamically change on both the - and -channels when exposed to NO. The -conduction channel showed superior performance across all parameters when compared to the device's -channel. For example, within the NO concentration range of 250 ppb to 2 ppm, the -channel achieved a responsivity of 37%, significantly surpassing the -channel's 12.5%. Additionally, the simultaneous evolution of multiple parameters in this dual response space enhances the selectivity of Si-JNTs toward NO and improves their ability to distinguish between different pollutant gases, such as NO, ammonia, sulfur dioxide and methane.

摘要

由于硅纳米线晶体管对沟道表面静电势变化具有增强的灵敏度,因此它们非常适合用于大气成分的灵敏检测。在本研究中,我们展示了独特的双极性硅无结纳米线晶体管(Si-JNTs),其在单个器件中兼具n型和p型传导。这些晶体管能够在从高浓度(25 - 50 ppm)到低浓度(250 ppb - 2 ppm)的广泛浓度范围内对关键的大气氧化污染物二氧化氮(NO)进行可扩展检测。作为电子受体,NO产生空穴并充当Si-JNTs的伪掺杂剂,改变电导和其他器件参数。因此,双极性Si-JNTs在室温下表现出双重响应,在暴露于气态NO时,n型和p型传导通道都会发生反应,从而与单极器件相比提供了更大的参数空间。当暴露于NO时,观察到Si-JNTs的关键特性,包括导通电流(Ion)、阈值电压(Vth)和迁移率(μ)在n型和p型通道上都会动态变化。与器件的p型通道相比,n型传导通道在所有参数上都表现出更优的性能。例如,在250 ppb至2 ppm的NO浓度范围内,n型通道实现了37%的响应率,显著超过p型通道的12.5%。此外,在这个双重响应空间中多个参数的同时演变增强了Si-JNTs对NO的选择性,并提高了它们区分不同污染气体(如NO、氨、二氧化硫和甲烷)的能力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/58a2/11826891/a5cb1b07aea6/am4c18322_0001.jpg

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