基于SU-8波导的热调谐傅里叶变换光谱仪。
Thermo-Tuning Fourier Transform Spectrometer Based on SU-8 Waveguide.
作者信息
Shao Qiongchan, Ma Xiao, Li Mingyu, He Jian-Jun
机构信息
State Key Laboratory of Extreme Photonics and Instrumentation, Centre for Integrated Optoelectronics, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China.
School of Information and Electronic Engineering, Zhejiang University of Science and Technology, Hangzhou 310023, China.
出版信息
Polymers (Basel). 2025 Jan 21;17(3):261. doi: 10.3390/polym17030261.
On-chip Fourier transform spectrometer (FTS) is a promising technology due to the compact size, low cost, and relatively high throughput. In this work, we design, fabricate, and characterize a Mach-Zehnder interferometer (MZI) FTS based on SU-8 polymer waveguide. The optical path length difference of MZI is tuned by a heater with a maximum power consumption of 2.2 W. The interference signal is analyzed by Fourier transform algorithm, to retrieve the spectrum of light source. The footprint of the fabricated FTS device is only 2 × 12 mm, with the spectral bandwidth of ~100 nm and resolution <20 nm.
片上傅里叶变换光谱仪（FTS）由于尺寸紧凑、成本低且通量相对较高，是一项很有前景的技术。在这项工作中，我们设计、制造并表征了一种基于SU-8聚合物波导的马赫-曾德尔干涉仪（MZI）FTS。MZI的光程差由一个最大功率消耗为2.2W的加热器调节。通过傅里叶变换算法分析干涉信号，以获取光源的光谱。所制造的FTS器件占地面积仅为2×12mm，光谱带宽约为100nm，分辨率<20nm。
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