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气动喷雾技术沉积的Mn掺杂ZnO薄膜的结构和光学性质的实验研究

Experimental investigation of structural and optical properties of Mn-doped ZnO thin films deposited by pneumatic spray technique.

作者信息

Rahal Abdelghani, Bouchama Idris, Ghebouli M A, Alanazi Faisal Katib, Ghebouli B, Fatmi M, Chihi T, Althagafi Talal M, Khettab Khatir

机构信息

Department of electronics, Faculty of Technology, University of M'sila, M'sila, 28000, Algeria.

Research Unit on Emerging Materials (RUEM), University Ferhat Abbas, Setif1, Setif, 19000, Algeria.

出版信息

Sci Rep. 2025 Feb 27;15(1):7086. doi: 10.1038/s41598-025-90425-1.

DOI:10.1038/s41598-025-90425-1
PMID:40016309
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11868554/
Abstract

Mn-doped ZnO thin films with varying Mn concentrations were synthesized on glass substrates using the pneumatic spray technique. Energy-dispersive X-ray (EDX) analysis confirmed the substitution of Zn by Mn in the ZnO matrix. X-ray photoelectron spectroscopy (XPS) revealed characteristic spin-orbit energy states of Zn:2p and Mn:3d, indicating strong Mn-ZnO interactions. Microstructural analysis showed non-uniform extended lines and spherical grains, with decreasing grain size as Mn concentration increased. X-ray diffraction (XRD) confirmed a polycrystalline hexagonal structure, with experimentally determined lattice parameters a = 3.1453 Å, c = 5.1353 Å, in agreement with CASTEP calculations. Optical measurements indicated ~ 80% absorbance in the visible range, with a shift from blue to red as Mn content increased, suggesting bandgap modulation. These findings highlight the potential of Mn-doped ZnO films for tunable optoelectronic applications.

摘要

采用气动喷雾技术在玻璃衬底上合成了不同锰浓度的锰掺杂氧化锌薄膜。能量色散X射线（EDX）分析证实了氧化锌基体中锰对锌的替代。X射线光电子能谱（XPS）揭示了锌2p和锰3d的特征自旋轨道能态，表明锰与氧化锌之间存在强相互作用。微观结构分析显示出不均匀的延伸线和球形晶粒，随着锰浓度的增加晶粒尺寸减小。X射线衍射（XRD）证实为多晶六方结构，实验测定的晶格参数a = 3.1453 Å，c = 5.1353 Å，与CASTEP计算结果一致。光学测量表明在可见光范围内吸收率约为80%，随着锰含量的增加从蓝色向红色偏移，表明带隙调制。这些发现突出了锰掺杂氧化锌薄膜在可调谐光电子应用中的潜力。

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