Gülseren Melisa Ekin, Benson Matthew, Parker Ryan W, Segovia-Fernandez Jeronimo, Yen Ernest Ting-Ta, Gómez-Díaz J Sebastián
Electrical and Computer Engineering Department, University of California, Davis, CA 95616 USA.
Kilby Labs-Texas Instrument, Santa Clara, CA 95051 USA.
IEEE Sens J. 2024 Jun;24(11):17313-17323. doi: 10.1109/jsen.2024.3388966. Epub 2024 Apr 19.
This article reports a comprehensive statistical analysis of uncooled infrared (IR) detectors based on radio frequency (RF) aluminum nitride (AlN) contour mode resonators (CMRs) integrated with spectrally selective IR metasurfaces. Moreover, it reports the lowest noise equivalent power (NEP) recorded from these types of devices . The metasurfaces are printed on top of the AlN resonator body to decouple mechanical, RF, and IR responses. Optical lithography is used to pattern the meta-surfaces, allowing the fabrication of hundreds of spectrally selective IR detectors with different sensing performances within the same chip. An automated characterization system is employed to quickly record parameters such as quality factor, noise, and responsivity. This approach allows to experimentally determine the geometrical dimensions of quasi-optimal IR detectors that exhibit NEP in the range and responsivities in the Hz/nW range. Additionally, the detector performance versus IR light is explored using different interrogation mechanisms, namely monitoring the CMR resonance frequency as well as the amplitude and phase of an RF signal that excites the device at resonance. The statistical analysis of hundreds of IR sensors reveals trends between parameters such quality factor and noise floor, and NEP and responsivity. These trends provide useful guidelines for the development of quasi-optimal spectrally selective IR sensors operating at room temperature.
本文报道了基于与光谱选择性红外超表面集成的射频（RF）氮化铝（AlN）轮廓模式谐振器（CMR）的非制冷红外（IR）探测器的综合统计分析。此外，还报道了这类器件记录到的最低噪声等效功率（NEP）。超表面印刷在AlN谐振器主体顶部，以解耦机械、射频和红外响应。采用光刻技术对超表面进行图案化，从而能够在同一芯片内制造数百个具有不同传感性能的光谱选择性红外探测器。使用自动化表征系统快速记录诸如品质因数、噪声和响应度等参数。这种方法能够通过实验确定在该范围内呈现NEP且在Hz/nW范围内具有响应度的准最优红外探测器的几何尺寸。此外，利用不同的探测机制研究探测器性能与红外光的关系，即监测CMR谐振频率以及在谐振时激发该器件的射频信号的幅度和相位。对数百个红外传感器的统计分析揭示了诸如品质因数与本底噪声以及NEP与响应度等参数之间的趋势。这些趋势为准最优室温工作光谱选择性红外传感器的开发提供了有用的指导原则。
