《微机电系统/纳机电系统器件与应用特刊（第二版）》编辑评论
Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 2nd Edition.
作者信息
Tsai Yao-Chuan, Huang Pin-Chun, Dai Ching-Liang
机构信息
Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, Taichung 402, Taiwan.
Department of Mechanical and Aerospace Engineering, University of California, Irvine, Engineering Gateway 4200, Irvine, CA 92697, USA.
出版信息
Micromachines (Basel). 2025 Feb 7;16(2):189. doi: 10.3390/mi16020189.
Abstract
Microelectromechanical systems (MEMSs) and nanoelectromechanical systems (NEMSs) are revolutionary technologies that merge mechanical and electronic components on microscopic and nanoscopic scales [...].
摘要
微机电系统（MEMS）和纳机电系统（NEMS）是将机械和电子元件在微观和纳米尺度上融合的革命性技术[……]。
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