Valenzuela-Pérez Ana, Collado Carlos, Mateu Jordi
Signal Theory and Communications (TSC) Department, Universitat Politècnica de Catalunya (UPC), 08034 Barcelona, Spain.
Micromachines (Basel). 2025 Apr 27;16(5):511. doi: 10.3390/mi16050511.
Bulk Acoustic Wave (BAW) resonators are essential components in modern RF communication systems due to their high selectivity and quality factor. However, spurious resonances caused by Lamb wave mode propagation along the in-plane directions degrade the filter performance. Traditional Finite Element Method (FEM) simulations provide accurate modeling but are computationally expensive, especially for arbitrarily shaped resonators and solidly mounted resonators (SMRs), whose stack of materials is composed of many thin layers of different materials. To address this, we extend a previously published model (named the Quasi-3D model), which employs the Transmission Line Matrix (TLM) method, enabling efficient simulations of complex geometries with more precise meshing. The new approach allows us to simulate different geometries, and we will show several apodized geometries with the aim of minimizing the lateral modes. In addition, the proposed approach significantly reduces the computational cost while maintaining high accuracy, as validated by FEM comparisons and experimental measurements.
体声波（BAW）谐振器因其高选择性和品质因数而成为现代射频通信系统中的关键组件。然而，沿面内方向传播的兰姆波模式引起的杂散谐振会降低滤波器性能。传统的有限元方法（FEM）模拟能提供精确建模，但计算成本高昂，特别是对于任意形状的谐振器和固态安装谐振器（SMR），其材料堆叠由许多不同材料的薄层组成。为解决这一问题，我们扩展了先前发表的一个模型（称为准三维模型），该模型采用传输线矩阵（TLM）方法，能够对具有更精确网格划分的复杂几何形状进行高效模拟。新方法使我们能够模拟不同的几何形状，并且我们将展示几种变迹几何形状，目的是最小化横向模式。此外，如通过FEM比较和实验测量所验证的，所提出的方法在保持高精度的同时显著降低了计算成本。
