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高性能碳纳米管电子器件:进展与挑战。

High-Performance Carbon Nanotube Electronic Devices: Progress and Challenges.

作者信息

Zhang Zirui, Zhang Nie, Zhang Zhiyong

机构信息

Key Laboratory for the Physics and Chemistry of Nanodevices, Center for Carbon-Based Electronics, School of Electronics, Peking University, Beijing 100871, China.

出版信息

Micromachines (Basel). 2025 May 1;16(5):554. doi: 10.3390/mi16050554.

Abstract

As silicon-based complementary metal-oxide-semiconductor (CMOS) technology approaches its physical and scaling limits at sub-3-nanometer nodes, critical challenges including the short-channel effect (SCE), surging power consumption, and aggravated parasitic effects have severely constrained further improvements in device performance, integration density, and energy efficiency. Carbon nanotubes (CNTs), with their superior electrical properties, exceptional gate controllability enabled by one-dimensional nanostructure, and compatibility with existing semiconductor processes, have emerged as an ideal candidate material for post-silicon high-performance electronics. Since their discovery, CNT electronics have evolved from fundamental research to a comprehensive technological framework. This review first systematically elaborates the physical characteristics of CNTs and operation mechanisms of electronic devices. Subsequently, we comprehensively summarize recent research progress in high-performance CNT electronic devices with particular emphasis on their breakthrough achievements. Through critical analysis of current developments, we thoroughly discuss fundamental challenges in material synthesis, device fabrication, and circuit integration, while evaluating potential solutions. Finally, we concentrate on future development directions for high-performance CNT devices, aiming to call for collaborative efforts from both academia and industry to accelerate the transition of CNT electronics from laboratory research to industrial implementation.

摘要

随着基于硅的互补金属氧化物半导体(CMOS)技术在亚3纳米节点接近其物理和缩放极限,包括短沟道效应(SCE)、功耗激增和寄生效应加剧等关键挑战严重限制了器件性能、集成密度和能源效率的进一步提升。碳纳米管(CNT)凭借其卓越的电学性能、由一维纳米结构实现的出色栅极可控性以及与现有半导体工艺的兼容性,已成为后硅时代高性能电子器件的理想候选材料。自被发现以来,碳纳米管电子学已从基础研究发展成为一个全面的技术框架。本综述首先系统阐述了碳纳米管的物理特性和电子器件的工作机制。随后,我们全面总结了高性能碳纳米管电子器件的最新研究进展,特别强调了它们的突破性成就。通过对当前发展的批判性分析,我们深入讨论了材料合成、器件制造和电路集成方面的基本挑战,同时评估了潜在的解决方案。最后,我们专注于高性能碳纳米管器件的未来发展方向,旨在呼吁学术界和工业界共同努力,加速碳纳米管电子学从实验室研究向工业应用的转变。

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