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一种基于聚合物的微机电系统(MEMS)扬声器,其具有由压电薄膜(PZT)驱动的部分硬化膜片。

A polymer-based MEMS loudspeaker featuring a partially stiffened membrane actuated by a PZT thin film.

作者信息

Liechti Romain, Dieppedale Christel, Rotrou Timothée, Le Rhun Gwenaël

机构信息

Univ. Grenoble Alpes, CEA, Leti, F-38000, Grenoble, France.

出版信息

Commun Eng. 2025 May 29;4(1):98. doi: 10.1038/s44172-025-00438-x.

DOI:10.1038/s44172-025-00438-x
PMID:40442290
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12122854/
Abstract

Miniaturized loudspeakers are increasingly relevant for wearable and transparent electronics, but achieving consistent acoustic performance, particularly at low frequencies, remains a challenge. Here we show a polymer-based loudspeaker that features a partially stiffened membrane actuated by a transferred thin film of lead zirconate titanate. The flexible polymer reduces overall stiffness, while the localized stiffening broadens the frequency response. The piezoelectric film is integrated through a transfer process that employs a donor substrate. We evaluate functionality through electrical, mechanical, acoustic, and optical measurements, including sound pressure level and resonance frequency, in both open field and in-ear conditions. The results confirm the device's ability to operate under different acoustic loads and demonstrate compatibility of the fabrication process with flexible and transparent substrates. This approach enables the integration of transparent piezoelectric actuators and is suitable for compact, bendable, and optically transparent audio systems.

摘要

小型扬声器在可穿戴和透明电子设备中越来越重要,但要实现一致的声学性能,尤其是在低频下,仍然是一项挑战。在此,我们展示了一种基于聚合物的扬声器,其特点是具有由转移的锆钛酸铅薄膜驱动的部分硬化膜。柔性聚合物降低了整体刚度,而局部硬化拓宽了频率响应。压电薄膜通过采用施主衬底的转移工艺集成。我们通过在开放场和入耳条件下的电学、力学、声学和光学测量来评估功能,包括声压级和共振频率。结果证实了该器件在不同声学负载下的运行能力,并证明了制造工艺与柔性和透明衬底的兼容性。这种方法能够集成透明压电致动器,适用于紧凑、可弯曲和光学透明的音频系统。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/49b3/12122854/a6c38cd6292b/44172_2025_438_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/49b3/12122854/9cffe1f08b3e/44172_2025_438_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/49b3/12122854/44ed0dedd73e/44172_2025_438_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/49b3/12122854/fd5f5e1e0599/44172_2025_438_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/49b3/12122854/e2c5a8a9be10/44172_2025_438_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/49b3/12122854/a6c38cd6292b/44172_2025_438_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/49b3/12122854/9cffe1f08b3e/44172_2025_438_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/49b3/12122854/44ed0dedd73e/44172_2025_438_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/49b3/12122854/fd5f5e1e0599/44172_2025_438_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/49b3/12122854/e2c5a8a9be10/44172_2025_438_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/49b3/12122854/a6c38cd6292b/44172_2025_438_Fig5_HTML.jpg

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本文引用的文献

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Capillary effect-based selective sealing strategy for increasing piezoelectric MEMS speaker performance.基于毛细作用的选择性密封策略以提高压电微机电系统扬声器性能。
Microsyst Nanoeng. 2024 Aug 7;10:108. doi: 10.1038/s41378-024-00753-x. eCollection 2024.
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IEEE Sens Lett. 2021 Nov;5(11). doi: 10.1109/lsens.2021.3122097. Epub 2021 Oct 21.
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微机电系统(MEMS)扬声器的最新发展综述
Micromachines (Basel). 2021 Oct 16;12(10):1257. doi: 10.3390/mi12101257.
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