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大口径电磁微机电系统镜子同步的建模与实现

Modeling and Implementation of Synchronization for Large-Aperture Electromagnetic MEMS Mirrors.

作者信息

Xu Fahu, Zhao Lingxiao

机构信息

College of Mechanical and Electronic Engineering, Northwest A&F University, Yangling 712100, China.

Tianjin Jinhang Institute of Computing Technology, Tianjin 300308, China.

出版信息

Micromachines (Basel). 2025 Feb 26;16(3):268. doi: 10.3390/mi16030268.

DOI:10.3390/mi16030268
PMID:40141879
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11944047/
Abstract

MEMS-based LiDAR has showcased extensive application potential in the autonomous driving sector, attributed to its cost-effectiveness, compactness, and seamless integration capabilities. However, MEMS LiDAR suffers from a short detection range, due to the small receiving aperture of the MEMS mirror. Our early study attempted to increase the detection range of MEMS LiDAR with a semi-coaxial design. In this paper, we further investigate the synchronization method for large-aperture electromagnetic MEMS mirrors, in which a synchronous motion transfer model of electromagnetic MEMS mirrors is constructed. The results of the simulations and experiments demonstrate that two electromagnetic MEMS mirrors are synchronous with an aperture of 60 π mm2, FoV of 60°, and scanning frequency of 220 Hz. The entire synchronization process of the electromagnetic MEMS mirrors is completed within 10 s, which verifies the feasibility of synchronizing large-aperture electromagnetic MEMS mirrors to increase the detection range of MEMS LiDAR.

摘要

基于微机电系统（MEMS）的激光雷达因其成本效益、紧凑性和无缝集成能力，在自动驾驶领域展现出了广泛的应用潜力。然而，由于MEMS反射镜的接收孔径较小，MEMS激光雷达的探测范围较短。我们早期的研究尝试通过半同轴设计来增加MEMS激光雷达的探测范围。在本文中，我们进一步研究了大孔径电磁MEMS反射镜的同步方法，构建了电磁MEMS反射镜的同步运动传递模型。仿真和实验结果表明，两个电磁MEMS反射镜在孔径为60π平方毫米、视场为60°、扫描频率为220赫兹的情况下实现了同步。电磁MEMS反射镜的整个同步过程在10秒内完成，这验证了同步大孔径电磁MEMS反射镜以增加MEMS激光雷达探测范围的可行性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/0f16bed1b5e3/micromachines-16-00268-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/62689d1a63c2/micromachines-16-00268-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/5f9c5d1480d6/micromachines-16-00268-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/acf1764d854e/micromachines-16-00268-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/cda658bf4159/micromachines-16-00268-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/cfadf358f6ce/micromachines-16-00268-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/f32459e4c049/micromachines-16-00268-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/a78bb0784c8e/micromachines-16-00268-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/d5dd555642eb/micromachines-16-00268-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/6fa307a33c35/micromachines-16-00268-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/549570756c4e/micromachines-16-00268-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/86dd1ad013a6/micromachines-16-00268-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/cfdd42f1fa3e/micromachines-16-00268-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/0f16bed1b5e3/micromachines-16-00268-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/62689d1a63c2/micromachines-16-00268-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/5f9c5d1480d6/micromachines-16-00268-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/acf1764d854e/micromachines-16-00268-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/cda658bf4159/micromachines-16-00268-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/cfadf358f6ce/micromachines-16-00268-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/f32459e4c049/micromachines-16-00268-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/a78bb0784c8e/micromachines-16-00268-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/d5dd555642eb/micromachines-16-00268-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/6fa307a33c35/micromachines-16-00268-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/549570756c4e/micromachines-16-00268-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/86dd1ad013a6/micromachines-16-00268-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/cfdd42f1fa3e/micromachines-16-00268-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9da1/11944047/0f16bed1b5e3/micromachines-16-00268-g013.jpg

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Micromachines (Basel). 2022 Sep 1;13(9):1444. doi: 10.3390/mi13091444.
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Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application.用于激光雷达应用的梳齿驱动MEMS镜对快速同步方法
Micromachines (Basel). 2021 Oct 21;12(11):1292. doi: 10.3390/mi12111292.
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Dynamic Modeling and Anti-Disturbing Control of an Electromagnetic MEMS Torsional Micromirror Considering External Vibrations in Vehicular LiDAR.
考虑车载激光雷达外部振动的电磁微机电系统扭转微镜的动态建模与抗干扰控制
Micromachines (Basel). 2021 Jan 9;12(1):69. doi: 10.3390/mi12010069.
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Micromachines (Basel). 2020 Apr 27;11(5):456. doi: 10.3390/mi11050456.