大口径电磁微机电系统镜子同步的建模与实现

Modeling and Implementation of Synchronization for Large-Aperture Electromagnetic MEMS Mirrors.

作者信息

Xu Fahu, Zhao Lingxiao

机构信息

College of Mechanical and Electronic Engineering, Northwest A&F University, Yangling 712100, China.

Tianjin Jinhang Institute of Computing Technology, Tianjin 300308, China.

出版信息

Micromachines (Basel). 2025 Feb 26;16(3):268. doi: 10.3390/mi16030268.

DOI:10.3390/mi16030268

PMID:40141879

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11944047/

Abstract

MEMS-based LiDAR has showcased extensive application potential in the autonomous driving sector, attributed to its cost-effectiveness, compactness, and seamless integration capabilities. However, MEMS LiDAR suffers from a short detection range, due to the small receiving aperture of the MEMS mirror. Our early study attempted to increase the detection range of MEMS LiDAR with a semi-coaxial design. In this paper, we further investigate the synchronization method for large-aperture electromagnetic MEMS mirrors, in which a synchronous motion transfer model of electromagnetic MEMS mirrors is constructed. The results of the simulations and experiments demonstrate that two electromagnetic MEMS mirrors are synchronous with an aperture of 60 π mm2, FoV of 60°, and scanning frequency of 220 Hz. The entire synchronization process of the electromagnetic MEMS mirrors is completed within 10 s, which verifies the feasibility of synchronizing large-aperture electromagnetic MEMS mirrors to increase the detection range of MEMS LiDAR.

摘要

基于微机电系统（MEMS）的激光雷达因其成本效益、紧凑性和无缝集成能力，在自动驾驶领域展现出了广泛的应用潜力。然而，由于MEMS反射镜的接收孔径较小，MEMS激光雷达的探测范围较短。我们早期的研究尝试通过半同轴设计来增加MEMS激光雷达的探测范围。在本文中，我们进一步研究了大孔径电磁MEMS反射镜的同步方法，构建了电磁MEMS反射镜的同步运动传递模型。仿真和实验结果表明，两个电磁MEMS反射镜在孔径为60π平方毫米、视场为60°、扫描频率为220赫兹的情况下实现了同步。电磁MEMS反射镜的整个同步过程在10秒内完成，这验证了同步大孔径电磁MEMS反射镜以增加MEMS激光雷达探测范围的可行性。