Aizawa Tatsuhiko, Nakata Hiroki, Nasu Takeshi
Surface Engineering Design Laboratory, Shibaura Institute of Technology, Tokyo 144-0056, Japan.
EBINAX Co., Ltd., Tokyo 144-0033, Japan.
Micromachines (Basel). 2025 Jun 11;16(6):696. doi: 10.3390/mi16060696.
Femtosecond laser micromachining was utilized to build up a micro-through-hole array into a sacrificial film, which was coated onto a copper specimen. This micro-through hole was shaped in the paraboloidal profile, with its micro-dimple on the interface between the copper substrate and the film. This profile was simply in correspondence with the laser energy profile. The array was used as a nucleation and growth site for nickel cluster deposition during wet plating. The micro-pillared unit cells nucleated at the micro-dimple and grew on the inside of the micro-through hole. After removing the sacrificial film, cleansing, and polishing, the nickel micro-pillar array was obtained, standing on the copper substrate. These unit cells and their alignments were measured through scanning electron microscopy and laser microscopy. Thermographic microscopy with FT-IR was utilized to measure the IR emittance as a function of wavelength. The focused areas were varied by controlling the aperture to analyze the effects of arrayed microtextures on the IR emittance.
利用飞秒激光微加工技术在涂覆于铜试样上的牺牲膜中构建微通孔阵列。该微通孔呈抛物面轮廓形状,在铜基板与薄膜的界面处有微凹坑。此轮廓与激光能量轮廓恰好对应。该阵列用作湿法电镀过程中镍簇沉积的成核和生长位点。微柱状单元胞在微凹坑处成核并在微通孔内部生长。去除牺牲膜、清洗并抛光后,获得了立在铜基板上的镍微柱阵列。通过扫描电子显微镜和激光显微镜对这些单元胞及其排列进行了测量。利用傅里叶变换红外热成像显微镜测量红外发射率随波长的变化。通过控制孔径改变聚焦区域,以分析排列的微纹理对红外发射率的影响。