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悬浮石墨烯压力传感器的电流效应研究

Investigation of Current Effect of Suspended Graphene Pressure Sensor.

作者信息

Mi Haowei, Qi Run, Li Pengcheng, Su Ningning, Wang Junqiang

机构信息

Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China.

Shanxi Key Laboratory of Graphene Sensing Materials and Devices, North University of China, Taiyuan 030051, China.

出版信息

Materials (Basel). 2025 Jun 14;18(12):2801. doi: 10.3390/ma18122801.

Abstract

The current effect of passive devices is crucial for device testing. The current effect of a suspended graphene pressure sensor in the range of 0-2 mA is studied in this paper. The results show that the resistance of graphene films and the piezoresistive effect of devices exhibit stable performance within the current threshold range of 400 μA and 300 μA, respectively. Auger electron spectroscopy and Raman spectroscopy tests indicate that the resistance of graphene increases first and then decreases at high current intensity, resulting from the electrostatic adsorption of oxygen atoms in the initial phase of electrification and the Joule-induced desorption in the later phase. This study presents guiding significance for the electrical testing of suspended graphene devices.

摘要

无源器件的电流效应对于器件测试至关重要。本文研究了悬浮式石墨烯压力传感器在0至2 mA范围内的电流效应。结果表明,石墨烯薄膜的电阻和器件的压阻效应分别在400 μA和300 μA的电流阈值范围内表现出稳定的性能。俄歇电子能谱和拉曼光谱测试表明,石墨烯的电阻在高电流强度下先增大后减小,这是由于在通电初始阶段氧原子的静电吸附以及后期焦耳诱导的解吸所致。该研究对悬浮式石墨烯器件的电学测试具有指导意义。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dda9/12195388/31f32a4c7b5b/materials-18-02801-g001.jpg

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