Wu Yingchun, Bao Kangjian, Liang Junxuan, Li Zongxi, Shi Yilin, Tang Renjie, Xu Kai, Wei Maoliang, Chen Zequn, Jian Jialing, Luo Ye, Tang Yiheng, Deng Qingyan, Dai Hao, Sun Chunlei, Zhang Wei, Lin Hongtao, Zhang Kewei, Li Lan
Zhejiang University, Hangzhou, 310058, China.
Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, Department of Electronic and Information Engineering, School of Engineering, Westlake University, Hangzhou, 310030, China.
Small Methods. 2025 Jun 27:e2500727. doi: 10.1002/smtd.202500727.
Flexible integrated photonic sensors are gaining prominence in intelligent wearable sensing due to their compact size, exceptional sensitivity, rapid response, robust immunity to electromagnetic interference, and the capability to enable parallel sensing through optical multiplexing. However, integrating these sensors for practical applications, such as monitoring human motions and physiological activities together, remains a significant challenge. Herein, it is presented an innovative fully packaged integrated photonic wearable sensor, which features a delicately designed flexible necklace-shaped microring resonator (MRR), along with a pair of grating couplers (GCs) coupled to a fiber array (FA). The necklace-shaped MRR is engineered to minimize waveguide sidewall-induced scattering loss, with a measured intrinsic quality factor (Q) of 1.68 × 10, ensuring highly sensitive and precise signal monitoring. GCs and FA enhance the seamless wearability of devices while maintaining superior sensitivity to monitor various human motions and physiological signs. These are further classified signals using machine learning algorithms, achieving an accuracy rate of 97%. This integrated photonic wearable sensor shows promise for human-machine interfaces, touch-responsive wearable monitors, and artificial skin, especially in environments susceptible to electromagnetic interference, such as intensive care units (ICUs) and spacecraft. This work significantly advances the field of smart wearable technology.
柔性集成光子传感器因其尺寸紧凑、灵敏度高、响应迅速、对电磁干扰具有强大免疫力以及能够通过光复用实现并行传感等优点,在智能可穿戴传感领域正日益受到关注。然而,将这些传感器集成用于实际应用,如同时监测人体运动和生理活动,仍然是一项重大挑战。在此,展示了一种创新的全封装集成光子可穿戴传感器,其特点是设计精巧的柔性项链形状的微环谐振器(MRR),以及一对与光纤阵列(FA)耦合的光栅耦合器(GC)。项链形状的MRR经过精心设计,以尽量减少波导侧壁引起的散射损耗,测得的本征品质因数(Q)为1.68×10,确保了高度灵敏和精确的信号监测。GC和FA提高了设备的无缝可穿戴性,同时保持了对各种人体运动和生理体征监测的卓越灵敏度。利用机器学习算法对这些信号进行进一步分类,准确率达到97%。这种集成光子可穿戴传感器在人机接口、触摸响应可穿戴监测器和人造皮肤方面显示出潜力,特别是在易受电磁干扰的环境中,如重症监护病房(ICU)和航天器。这项工作极大地推动了智能可穿戴技术领域的发展。