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用于射频滤波的带有镶嵌电极的悬浮铌酸锂声谐振器。

Suspended lithium niobate acoustic resonators with Damascene electrodes for radiofrequency filtering.

作者信息

Stettler Silvan, Villanueva Luis Guillermo

机构信息

Advanced Nanoelectromechanical Systems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), 1015, Lausanne, Switzerland.

出版信息

Microsyst Nanoeng. 2025 Jul 1;11(1):131. doi: 10.1038/s41378-025-00980-w.

DOI:10.1038/s41378-025-00980-w
PMID:40588512
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12209459/
Abstract

Data rates and volume for mobile communication are ever-increasing with the growing number of users and connected devices. With the deployment of 5G and 6G on the horizon, wireless communication is advancing to higher frequencies and larger bandwidths enabling higher speeds and throughput. Current micro-acoustic resonator technology, a key component in radiofrequency front-end filters, is struggling to keep pace with these developments. This work presents an acoustic resonator architecture enabling multi-frequency, low-loss, and wideband filtering for the 5G and future 6G bands located above 3 GHz. Thanks to the exceptional performance of these resonators, filters for the 5G n77 and n79 bands are demonstrated, exhibiting fractional bandwidths of 25% and 13%, respectively, with low insertion loss of around 1 dB. With its unique frequency scalability and wideband capabilities, the reported architecture offers a promising option for filtering and multiplexing in future mobile devices.

摘要

随着用户和连接设备数量的不断增加,移动通信的数据速率和数据量也在不断增长。随着5G和6G即将部署,无线通信正在向更高频率和更大带宽发展,以实现更高的速度和吞吐量。当前的微声学谐振器技术作为射频前端滤波器的关键组件,正难以跟上这些发展步伐。这项工作提出了一种声学谐振器架构,可为位于3GHz以上的5G及未来6G频段实现多频、低损耗和宽带滤波。由于这些谐振器的卓越性能,展示了用于5G n77和n79频段的滤波器,其分数带宽分别为25%和13%,插入损耗约为1dB。凭借其独特的频率可扩展性和宽带能力,所报道的架构为未来移动设备中的滤波和复用提供了一个有前景的选择。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a6f1/12209459/731b7eb3a013/41378_2025_980_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a6f1/12209459/13527298ed00/41378_2025_980_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a6f1/12209459/1f951e4297ee/41378_2025_980_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a6f1/12209459/1de4c5facb47/41378_2025_980_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a6f1/12209459/731b7eb3a013/41378_2025_980_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a6f1/12209459/13527298ed00/41378_2025_980_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a6f1/12209459/1f951e4297ee/41378_2025_980_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a6f1/12209459/1de4c5facb47/41378_2025_980_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a6f1/12209459/731b7eb3a013/41378_2025_980_Fig4_HTML.jpg

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本文引用的文献

1
Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios.用于未来5G和6G蜂窝无线电的紧凑型宽带纳米声学带通滤波器。
Nat Commun. 2024 Jan 5;15(1):304. doi: 10.1038/s41467-023-44038-9.
2
6-20 GHz 30% ScAlN Lateral Field-Excited Cross-Sectional Lamé Mode Resonators for Future Mobile RF Front Ends.用于未来移动射频前端的6-20 GHz 30% ScAlN横向场激发横截面拉梅模式谐振器
IEEE Trans Ultrason Ferroelectr Freq Control. 2023 Oct;70(10):1201-1212. doi: 10.1109/TUFFC.2023.3312913. Epub 2023 Oct 17.
3
SAW Filters on LiNbO/SiC Heterostructure for 5G n77 and n78 Band Applications.
用于5G n77和n78频段应用的LiNbO/SiC异质结构上的声表面波滤波器
IEEE Trans Ultrason Ferroelectr Freq Control. 2023 Sep;70(9):1157-1169. doi: 10.1109/TUFFC.2023.3299635. Epub 2023 Aug 29.
4
Ultra-Large-Coupling and Spurious-Free SH Plate Acoustic Wave Resonators Based on Thin LiNbO.基于薄铌酸锂的超大耦合且无杂散的SH型板声波谐振器
IEEE Trans Ultrason Ferroelectr Freq Control. 2020 Feb;67(2):374-386. doi: 10.1109/TUFFC.2019.2944302. Epub 2019 Sep 27.