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用于深度感知的垂直腔面发射激光器上的单片集成超表面

Monolithically Integrated Metasurface on a PCSEL for Depth Perception.

作者信息

Hsu Wen-Cheng, Miao Wen-Chien, Hong Yu-Heng, Kuo Hao-Chung, Huang Yao-Wei

机构信息

Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University, Hsinchu 300093, Taiwan.

Semiconductor Research Center, Hon Hai Research Institute, Taipei 11492, Taiwan.

出版信息

Nano Lett. 2025 Jul 23;25(29):11382-11390. doi: 10.1021/acs.nanolett.5c02540. Epub 2025 Jul 11.

Abstract

Dot projectors are pivotal for depth perception in modern consumer electronics, from smartphones to extended reality devices, enabling applications in computational imaging, machine vision, and privacy-preserving technologies. However, existing dot projector designs face significant challenges related to their size and power consumption. Here, we demonstrate the first monolithic integration of a metasurface hologram and a photonic crystal surface-emitting laser (PCSEL) to realize a chip-scale structured light projector. This approach achieves unprecedented reductions in both device footprint and power usage, while preserving practical 3D sensing capabilities. Our wafer-level design features a compact footprint of 0.025 mm, representing an approximately 2450-fold reduction in volume compared to commercial DOE-VCSEL dot projectors, while also reducing power consumption by 28.7%. The integration strategy offers promising fabrication compatibility and represents a transformative advancement in a compact transceiver system, paving the way for next-generation applications in biometrics, extended reality, and consumer electronics.

摘要

点投影仪对于现代消费电子产品(从智能手机到扩展现实设备)中的深度感知至关重要,可实现计算成像、机器视觉和隐私保护技术等应用。然而,现有的点投影仪设计在尺寸和功耗方面面临重大挑战。在此,我们展示了超表面全息图和光子晶体表面发射激光器(PCSEL)的首次单片集成,以实现芯片级结构光投影仪。这种方法在保持实际3D传感能力的同时,实现了设备占地面积和功耗的前所未有的降低。我们的晶圆级设计具有0.025平方毫米的紧凑占地面积,与商用DOE-VCSEL点投影仪相比,体积减少了约2450倍,同时功耗也降低了28.7%。这种集成策略具有良好的制造兼容性,代表了紧凑型收发器系统的变革性进展,为生物识别、扩展现实和消费电子产品的下一代应用铺平了道路。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/838c/12291584/539115acfe68/nl5c02540_0001.jpg

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