Zhang Yanfei, Yuan Kaiping, Yu Zhaoan, Zhang Yunhan, Liu Xin, Lv Tieliang
State Key Laboratory of Integrated Chips and Systems, College of Integrated Circuits and Micro-Nano Electronics, Fudan University, Shanghai 200433, China.
Frontier Institute of Chip and System Technology, Fudan University, Shanghai 200433, China.
Sensors (Basel). 2025 Jun 27;25(13):4027. doi: 10.3390/s25134027.
The application of oxygen sensors based on Tunable Diode Laser Absorption Spectroscopy (TDLAS) in the industrial field has received extensive attention. However, most of the existing studies construct detection systems using discrete devices, making it difficult to apply them in the industrial field. In this work, through the optimization of the sensor circuit, the size of the core components of the sensor is reduced to 7.8 × 7.8 × 11.8 cm, integrating the laser, photodetector, and system control circuit. A novel integrated optical path design is proposed for the optical mechanical structure, which enhances the structural integration and long-term optical path stability while reducing the system assembly complexity. The interlocking design of the laser-driven digital-to-analog converter (DAC) and photocurrent acquisition analog-to-digital converter (ADC) reduces the requirements of the harmonic signal extraction for the system hardware. By adopting a high-precision ADC and a high-resolution pulse-width modulation (PWM), the peak-to-peak value of the laser temperature control noise is reduced to 2 m°C, thereby reducing the detection noise of the sensor. This oxygen detection system has a minimum response time of 0.1 s. Under the condition of a 0.5 m detection optical path, the Allan variance shows that when the integration time is 5.6 s, the detection limit reaches 53.4 ppm, which is ahead of the detection accuracy of similar equipment under the very small system size.
基于可调谐二极管激光吸收光谱技术(TDLAS)的氧传感器在工业领域的应用受到了广泛关注。然而,现有的大多数研究都是使用分立器件构建检测系统,这使得它们难以应用于工业领域。在这项工作中,通过对传感器电路的优化,将传感器核心部件的尺寸减小到7.8×7.8×11.8厘米,集成了激光器、光电探测器和系统控制电路。针对光机械结构提出了一种新颖的集成光路设计,在降低系统组装复杂度的同时,增强了结构集成度和光路长期稳定性。激光器驱动的数模转换器(DAC)和光电流采集模数转换器(ADC)的互锁设计降低了系统硬件对谐波信号提取的要求。通过采用高精度ADC和高分辨率脉宽调制(PWM),将激光器温度控制噪声的峰峰值降低到2 m°C,从而降低了传感器的检测噪声。该氧检测系统的最小响应时间为0.1 s。在0.5 m检测光路的条件下,阿伦方差表明,当积分时间为5.6 s时,检测限达到53.4 ppm,在非常小的系统尺寸下领先于同类设备的检测精度。